TECHNICAL PROGRAM
May 30th,
2016
18:00-20:00
Registration
May 31st,
2016
08:30-09:00
Registration & Coffee
09:00-09:20
Conference Opening (Tea saloon)
09:20-10:20
Plenary Session (Tea saloon)
- "Internet
of Autonomous Things" by Dr. Yoshihiro
Kawahara
(University of Tokyo)
Session Chair: Marta RENCZ (BME)
10:20-10:40
Exhibitor presentation (Tea saloon)
10:40-11:10
Coffee break
11:10-12:30
Technical Sessions
Packaging & Integration
(Tea saloon)
Session Chair: Tie LI
(SIMIT)
- 3D force sensors for laparoscopic surgery tool
J‡nos Rad—,
Csaba DŸcső,
G‡bor Battistig,
G‡bor SzebŽnyi,
PŽter FŸrjes,
Zbigniew Nawrat,
Kamil Rohr
- Fabrication of ultralarge
single order diffraction grating for soft X-ray monochromator
Yilei Hua,
Nan Gao, Changqing
Xie
- Monolithic Integration of Multiple Sensors on
a
Single Silicon Chip
Qing Ma, Zheyao
Wang, Dong Wu, Liyang Pan
- Wafer Level Packaging of MEMS and 3D
Integration
with CMOS for fabrication of Timing Microsystems
Charles-Alix Manier,
Kai Zoschke,
Martin Wilke, Hermann Oppermann,
David Ruffieux, Silvio Dalla Piazza, Tommi
Suni, James Dekker, Giorgio Allegato, Klaus-Dieter Lang
RF MEMS (Gobelin
saloon)
Session Chair: Arturo AYON
(Univ. of Texas at San Antonio)
- Wafer-level thin film micropackaging
for RF MEMS applications
Anna Persano, Andrea Lucibello,
Romolo Marcelli,
Giovanni Capoccia, Emanuela
Proietti, Alvise
Bagolini,
Jacopo Iannacci, Pietro
Siciliano, Fabio Quaranta
- A Novel Design of Low-Voltage Low-Loss K-Band
RF-MEMS Capacitive Switch
Li-Ya Ma, Norhayati
Soin, Anis
Nurashikin Nordin
- Low Power and High Voltage Swing Cascode Pierce Oscillator for MEMS SAW Resonators
Haidar Hamzah,
Anis Nurashikin
Nordin, Jamilah
Karim
12:30-14:00
Lunch
14:00-15:20
Technical Sessions
Reliability &
Characterization (Tea saloon)
Session Chair: Francis
PRESSECQ (CNES)
- Characterization of LPCVD SiC thin films at Elevated Temperatures
for Robust
MEMS Sensor Applications
Radoslav Rusanov,
Rohlfing Franziska,
Juergen
Graf, Holger Rank, Tino
Fuchs, Oliver
Kraft
- In-situ Measurement of PoissonÕs Ratio for
Germanium nano-bridge in TEM
Xiao Zhang, Fangfang Xu,
Zhiqiang
Mu, Zengfeng Di, Tie Li, Yuelin Wang
- Multi-axis dielectric liquid-based tactile
sensor with tunable sensing range and sensitivity
Kai-Wei Liao, Max T. Hou,
J. Andrew Yeh
- Mechanical characterization of biomedical
electrode on knit textile
Seiichi Takamatsu, Toshihiro Itoh
CAD 1 (Gobelin
saloon)
Session Chair: Romolo MARCELLI (CNR-IMM
Roma)
- Design of a Novel Tri-axial Force Sensor for
Optimized Design of Prosthetic Socket for Lower Limb Amputees
Guido Sordo, Leandro Lorenzelli
- Analysis of Dynamic Deformation in 1-D
Resonating Micromirrors
Russell Farrugia,
Ivan Grech, Owen Casha,
Joseph Micallef, Edward Gatt
- Enhanced Design of Microsystems by Combining
Lumped and Distributed System-level Models
Gabriele Schrag,
Thomas KŸnzig, Alfons
DehŽ
- Shape Optimization For High Quality Factor
Flexural Mechanical Resonators Operated In Air
Guillaume Aoust, Rapha‘l
Levy, BŽatrice Bourgeteau,
Olivier Le Traon
15:20-16:05
Poster introduction
Devices & Components 1
(Tea saloon)
Session Chair: Benoit
CHARLOT (IES)
- A High Precision Quartz Crystal MEMS
Accelerometer Based 2 Axis Inclinometer
R Levy, B Bourgeteau,
J Guerard, P Lavenus
- Design and Simulation of a High Tuning Range
MEMS Digital Varactor using SU-8
Noor Amalina Ramli,
Arslan Tughrul,
Haridas Nakul,
Zhou Wei
- Design of an Integrated Piezoelectric
Micro-Flapper Based on Bionic Principles
Regine Behlert,
Gabriele Schrag,
Robert Wieland, Christoph Kutter,
Gerhard Wachutka
- Determination of copper
losses
from measurement and simulation in planar windings.
A Abderahim, A.T. Mahamat,
S. Capraro, A. Moungache,
J.P. Chatelon, D. Pietroy,
J.J. Rousseau
- Development and integration of screen printed transducers for the detection of
pollutants
in aquatic environments
David Lapeine,
Jean-Yves Ferrandis, Didier Laux,
Fabien Pascal, Philippe Combette
- Development of ITO- and FET-Based Cow Rumen
Sensor for Long-Term pH Value Monitoring
Lan Zhang, Jian
Lu, Hironao Okada , Hirofumi Nogami, Toshihiro Itoh
- Evaluating Different Types of Actuators for
Liquid Screen Overlays (LSO)
Ahmed Farooq, Grigori
Evreinov, Roope
Raisamo
- Implementation of CMOS Oscillator for CMOS SAW
Resonator
Jamilah Karim,
Anis Nurashikin
Nordin
- Improved Design of an Implantable Heart
Monitoring Device
Anh-Tuan T. Nguyen, Jonas Tyss¿, Knut E. Aasmundtveit,
Lars Hoff, Ole-Johannes Grymyr,
Kristin Imenes
Microfabrication, Integration & Packaging
(Gobelin saloon)
Session Chair: Toshihiro
ITOH (AIST)
- Thermal Humidity Reliability Criterions for a
Typical TSV Device
Ben-Je Lwo, Kun-Fu
Tseng, Huang Zi-Yan, Kuo-Hao
Tseng, Teng Chia-Liang
- Evaporated Zr-V, Zr-Ti and Zr-Co
getter thin
films: activation temperature and microstructure
Ming Wu, Sylvain Lemettre, Djamel Mansour, Marie-Paule
Plante, Alain Bosseboeuf,
Seonho Seok,
Johan Moulin
- Fabrication of Antireflective Polymer Films
with Subwavelength Structures using Roll
to Roll Nanoimprint Lithography
Cheng-Hsin Chuang,
Deng-Maw Lu, Po-Hsiang Wang, Wen-Yu Lee
- Low coercivity NiFeMo thick films for wafer-level fabrication
of magnetic microsensors
Martin Theis,
Joachim Ernst Hoffmann, Monika Saumer
- LTCC - Packaging of a laser optical system for
harsh environments
Martin Ihle, Steffen Ziesche,
Eric Beckert,
Marcel Hornaff
- Megasound Acoustic Surface Treatment Process in the Printed
Circuit Board
Industry
Thomas.D.A Jones, David
Flynn, Marc P.Y. Desmulliez
- Micro-ball Lens Array Formation Using
Different
Hydrophilic Pattern Effect
Chih-Wei Yang, Yan-Ting Che, Hsiharng Yang,
Yi-Ta Wang
- The Effect of Film Thickness on the Tribo-mechanical Properties of the Chrome-Gold
Thin Film
Corina Birleanu,
Marius Pustan
16:05-18:00
Poster viewing / Exhibition
18:00-19:30
Sponsor Welcome Reception
Jun 1st,
2016
08:30-09:00
Registration
09:00-10:00
Plenary Session (Tea saloon)
- Ç
Nano-patterning for better and more efficient photonic devices È by Dr. Harun H. Solak
(EULITHA AG, Switzerland)
Session Chair: Niels TAS (MESA+)
10:00-10:30
Coffee break
10:30-11:50
Technical Sessions
CAD 2 (Tea saloon)
Session Chair: Aurelio
SOMA (Politecnico
di Torino)
- Impact of the closed-loop phase shift on the
frequency stability of capacitive MEMS oscillators
Alexis Brenes,
Jerome Juillard, Filipe Vinci Dos Santos
- Thermal modelling
of
integrated microscale heatsink
structures
Gyorgy Bognar,
Gabor Takacs,
Laszlo Pohl, Peter Szabo
- Analysis for the spacing between the separated
dies during the dicing wafer expanding
Wan-Chun Chuang, Wei-Long Chen, Ben Tsai,
Rachel Wu
- Compact modeling approach for microchannel cooling aimed at high-level thermal
analysis of 3D packaged ICs
M‡rton NŽmeth,
L‡z‡r Jani,
Andr‡s Poppe
Bio & Fluidics (Gobelin saloon)
Session Chair: Anis Nurashikin
NORDIN
(International Islamic University)
- Functionalizing micro-cantilevers for meat
degradation measurements
Ying Wang, Elzbieta
Karolina Sobolewska, Jacek
Fiutowski, Jorg
Albers, Eric Nebling, Bernhard Wagner,
Wolfgang Benecke,
Horst-Gunter Rubahn, Roana
De Oliveira Hansen
- Embedded Sensors for Micro Transdermal
Interface
Platforms (MicroTIPs)
Conor OÕMahony,
Andrea Bocchino, Eleonora
Sulas,
Antonio Ciarlone, Guiseppe
Giannoni, Suzanne OÕCallaghan, Anan Kenthao,
A. James P. Clover, Danilo Demarchi,
Paul Galvin, Konstantin Grygoryev
- Laser Interference Lithography for the
collective fabrication of quartz-microcylinders
Zhanna Santybayeva,
Afaf Meghit,
Charles De Marin, Roland Teissier,
Frederic Pichot, Benoit Charlot,
Francesco Pedaci
- Label-free microfluidic blood cells
micro-separator
Foughalia Aissa,
S. Noorjannah
Ibrahim
11:50-12:30
Poster Introduction
Devices & Components 2
(Tea saloon)
Session Chair: Knut
AASMUNDTVEIT (HBV)
- RF MEMS fabrication in LTCC Technology
Andrea Lucibello, Romolo
Marcelli, Ernesto Di
Paola, Sergio Di Nardo, Daniele Pochesci,
Renato Croci, Chiara Germani
- Mechanical Behavior of T-Shaped AlN Membrane based on Thin Film Elongation
Acoustic
Resonator
Etienne Herth,
Franck Lardet-Vieudrin, Laurie Valbin, Ga‘lle Lissorgues
- Performance improvement Through Structural
Optimization of Piezoelectric Millimeter-Sized Cantilever Sensors
Mehrdad Aghamohammadi,
Mahnaz Shamshirsaz,
Amir Hossein Rezaie
- Precisely tailored solid state nanopores for molecule recognition
PŽter FŸrjes
- Serpentine Microfluidic Structures for
Concentration Gradient Generators
Adawiyah ZAIDON, Anis
Nurashikin
NORDIN, Ahmad Faris ISMAIL, Mak
Wing Cheung
- Study on the Effectiveness of Different
Electrode Geometries for Sputtered Aluminium
Nitride-based MEMS Energy Harvesters
Guido Sordo, Jacopo Iannacci,
Ulrich Schmid
- Synchronized Oscillation in Micro-Mechanically
Coupled Oscillator System: Part III Ð Optimization of Polymer-based
Structures
Applicable to Gas Molecule Sensing
Xu Du, Mengyuan
Mao, Dong F. Wang, Zhiyu Zhang, Xu Yang, Xin Wang, Xin Liu, Tsuyoshi Ikehara,
Ryutaro Maeda
CAD, Design & Test (Gobelin saloon)
Session Chair: Peter
Schneider (Fraunhofer IIS/EAS)
- A Pin-Count Reduction Algorithm for Flow-Based
Microfluidic Biochips
Alexander Schneider, Paul Pop, Jan Madsen
- Biodevice Optimization based on Piezoresistive
Sensor Dedicated to Monitoring the Culture of Fibroblast Collagen
Lattices
E. Yusifli, E. Herth,
T. Gharbi, R. Yahiaoui,
D. Belharet , M. Addouche
- Control of Tribological
Properties of Ultrathin Polysilicon Films
Zygmunt Rymuza,
Marcin
Michalowski, Rodica-Cristina Voicu,
Angela Baracu, Cosmin
Obreja, Raluca
Muller
- Detection of Out-of-Plane and In-Plane (XYZ)
Motions of Piezoelectric Microcantilever
by 3D-Laser Doppler Vibrometry
Etienne Herth,
Emmanuelle AlgrŽ, Franck Lardet-Vieudrin,
Laurie Valbin, Florent
Deux, Jochen
Schell, Heinrich
Steger
- MEMS switch dynamic voltage profile analysis
for
reliability
Martin Hill, Cezary Kosla
- Numerical study of a two-dimensional thermal
convection gyroscope
Guillaume Kock,
Philippe Combette, Benoit Charlot,
Markus Schneider, Caroline Gauthier-Blum, Alain Giani
- Thermo-Mechanical Analysis of Laser Peeling of
Ultrathin Glass for Removing Edge Flaws in Web Processing Applications
Kuo-She Chen, Tian-Shiang
Yang, Rong-Can hong,
Tz-Cheng Chiu, Alex C. D. Wen, Chun-Han
Li, Chien-Jung Huang, Kun-Tso Chen, Mao-Chi Lin
- Testing and Characterisation
of Electrothermal Microgrippers
with Embedded Microheaters
Muaiyd Al Zandi,
Rodica-Cristina Voicu,
Raluca
Muller, Changhai Wang
12:30-14:00
Lunch
14:00-15:00
Plenary Session (Tea saloon)
- Ç
Development of iontronics Ð application
for
energy harvester È by Dr. Shimpei
Ono, Central Research Institute of Electric Power Industry, Kanagawa,
Japan
Session Chair: Yoshio MITA
(Univ. Tokyo)
15:00-17:00
Poster viewing / Exhibition
17:00-22:00
Social Event
June 2nd,
2016
08:50-09:20
Registration
09:20-10:20
Technical Sessions
Inertial & Resonant
(Tea saloon)
Session Chair: Rapha‘l LEVY (ONERA)
- Gallium nitride MEMS resonators: how residual
stress impacts design and performances
Christophe Morelle,
Didier ThŽron, Bertrand Grimbert,
Isabelle Roch-Jeune, Virginie
Brandli,
Vanessa Avramovic, Etienne Okada, Marc Faucher
- High Sensitive I-Shaped Piezoelectric Excited
Millimeter-sized Cantilevers as Mass and Liquid Level Detectors
Mehrdad Aghamohammadi,
Mahnaz Shamshirsaz,
Amir Hossein Rezaie
- Detecting Volatile Organic Compounds Using a
Resonant Microcantilever-based System
Maira Possas
Abreu, Farbod Ghassemi,
Lionel Rousseau, Gaelle Lissorgues, Massiel
Habchi, Emmanuel Scorsone
MOEMS (Gobelin
saloon)
Session Chair: Henri CAMON
(LAAS-CNRS)
- Design of Wide-Band Tunable Optical Filters
with
Cascaded Microring Resonators and
Shaped-Finger
Comb-Drive Actuators
Dooyoung Hah
- Highly Sensitive Optical Motion Detector
Adrian TEO, Holden LI, Yong-Jin YOON
- Process Design and Profile Analysis of
Dual-Curvature
with Dual-Focus of Microlens Array
Hsiharng Yang, Ruei-Ci
JuangJian,
Yen-Ting Tu
10:20-10:50
Coffee break
10:50-12:30
Technical Sessions
Energy Harvesting (Tea
saloon)
Session Chair: Holden LI
(NTU)
- Silicon Solar Cell Efficiency Improvement
Employing the Photoluminescent,
Down-Shifting Effects
of Carbon Quantum Dots
J Elias Pelayo Ceja,
Rosendo Lopez-Delgado, Aldo Zazueta Raynaud, Emmanuel Saucedo,
Ruben Ruelas, Arturo A. Ayon,
- Potentialities of micro-supercapacitors
as energy storage buffers in embedded micro-systems
Ana•s Ferris, Sebastien
Garbarino,
Daniel Guay, David Pech
- Electrostriction as an Integrated Transduction
Method for Organic MEMS
Hussein Nesser, Jinkai
Yuan, Annie Colin, Philippe Poulin,
Isabelle Dufour, HŽlne Debeda, CŽdric Ayela
- Influence of Au nanoclusters
on the Power Conversion Efficiency of Hybrid Solar Cells
Manisha Sharma, Arturo A. Ayon
Microfabrication (Gobelin
saloon)
Session Chair: Hsiharng YANG (National
Chung Hsing
Univ.)
- Development of an elementary micromachined
electromagnetic digital actuator for microdisplacements
Zhichao Shi, Beno”t
BŽlier,
Emile Martincic, Johan Moulin, Elie Lefeuvre,
Laurent Petit, JŽrŽmy Terrien,
Christine Prelle, FrŽdŽric
Lamarque
- Sub-ppm Level NO2 Sensor With Sulfur Doped Graphene
Lianfeng Guo,
Chen Liang, Yuelin
Wang, Tie Li
- Demonstration of 0-30V Comb-Drive MEMS
Actuator
by integrated switching circuit with post-mesa-isolated standard 5V
CMOS
transistors
Yuki Okamoto, Isao Mori, Yoshio Mita
- Solid-Liquid Interdiffusion
(SLID) Bonding Ð Intermetallic Bonding for High Temperature Applications
Knut E. Aasmundtveit, Thi-Thuy
Luu, Torleif
A. Tollefsen, Kaiying
Wang, Hoang-Vu Nguyen, Nils Hoivik
- 3D-Fractal Engineering Based on Oxide-only
Corner Lithography
J.W. Berenschot,
Magdalena Malankowska, Roald Tiggelaar, Jo‘l Geerlings,
Reyes Mallada, Maria Pilar
Pina, Han Gardeniers,
Niels Tas
12:30-13:00
Closing Session (Tea saloon)
13:00-14:30
Lunch
14:30-18:00
Visit of BME facilities