May
29th,
2017
18:00-20:00 Registration
May 30th, 2017
08:30-09:00 Registration & Coffee
09:00-09:20 Conference Opening
09:20-10:20 "Solar cells micro cells arrays"
by Professor
J.F. Guillemoles (Chimie-Paristech)
Session Chair: Yoshio MITA
(Univ. Tokyo)
10:20-10:40 Exhibitor Introduction
10:40-11:10 Coffee Break
11:10-12:30 Technical Sessions
Optical Components
Session
Chair: Franck CHOLLET (FEMTO-ST, Univ. Franche-Comt)
- Bionic Compound Eye Using Microlens Array with Multi-focus and
Long Focal Depth
Shih-Huan Tang, Yi-Ta Wang, Ruei-Cijhang Jing, Hsiharng Yang
- Soft mold NanoImprint Lithography: a versatile tool for
sub-wavelength grating applications
Sylvain Pelloquin, Sylvain Auge, Ksenia Sharshavina, Jean-Baptiste
Doucet, Henri Camon, Olivier Gauthier-Lafaye
- Capacitance measurement techniques in MOEMS angular vertical
comb-drive actuators
Barnaby Portelli, Russell Farrugia, Ivan Grech, Owen Casha, Joseph
Micallef, Edward Gatt
- Poster Introduction: Enabling patterning of polymer optical
devices working at visible wavelength using thermal nano-imprint
lithography
Miguel
Diez Garcia, Vincent Raimbault, Simon Joly, Laurent Oyhenart, Leire
Bilbao, Chi Thanh Nguyen, Isabelle Ledoux-Rak, Laurent Bechou, Isabel
Obieta, Corinne Dejous
- Poster Introduction: Fabricate diamond nanowire based on the
silver nanotip grating towards plasmon-enhanced applicaiton
Tang Jun, Hao Guo, Xia Meijing, Liu Jun, Zhao Rui, Ma Zongmin
- Poster Introduction: Plasmon-enhanced
sensitivity of Spin-based sensors based on the diamond NV color center
Hao Guo, Tang Jun, Chen Yulei, Wu Dajin, Liu Jun, Zhao Rui, Ma Zongmin
- Poster Introduction: Fabrication
of ultralarge single order diffraction grating with high surface
flatness
Yilei Hua, Changqing Xie, Nan Gao, Xiaoli Zhu, Hailiang Li
Design
Methods
Session
Chair: Marta RENCZ
(Budapest University of Technology and Economics)
- Modeling
of an Out-of-plane Capacitive MEMS Transducer with Dynamically Coupled
Electrodes
Gabriele Bosetti, Johannes Manz, Gabriele Schrag, Alfons Deh
- Successive
network reduction method for parametric transient results
Mrton Nmeth, Andrs Poppe
- Coriolis
Vibrating Gyroscope Modelling for parametric identification and optimal
design
Lopold Delahaye, Jean Guerard, Fabien Parrain
- Reduced
order modeling and optimization of the magnetic thin film vibrating
beam magnetometer
Thomas Perrier, Raphael Levy, Patrick Kayser, B. Verlhac, Pierrre
Lavenus, Johan Moulin
12:30-14:00 Lunch
14:00-15:20 Technical Sessions
Chemical and Fluidic Sensors and Devices
Session
Chair: Dong F. WANG (Jilin Univ. Changchun)
- High
Performance pH Sensor by Using Silicon Nanowire Array
Xun Yang, Shixing Chen, Yi Wang, Yuelin Wang, Tie Li
- Zeolite-based
Thermal Mass Gas Sensor with Self-Identification Algorithm
Matthieu Denoual, Mathieu Pouliquen, Maxime Harnois, Olivier De
Sagazan, Agnes Tixier-Mita, Yoshio Mita
- A
coplanar waveguide microfluidic sensor for a micrometric local
spectroscopy of liquid solutions
Romolo Marcelli, Andrea Lucibello, Giovanni Maria Sardi, Emanuela
Proietti, Francesco Cursi
- Integration
of Electrodes with Diphasic Microfluidics for Capacitance Tuning
Charles-Louis Azzopardi, Franck Chollet, Nathalie Tarchichi,
Jean-Franois Manceau
New Devices
Session
Chair: Tie LI (SIMIT-CAS)
- Design
optimization of a high frequency resonating micro-mirror with low
dynamic deformation
Russell Farrugia, Ivan Grech, Duncan Camilleri, Owen Casha, Joseph
Micallef, Edward Gatt
- Design
and Simulation of a 3-Bit DMTL Phase Shifter for Wideband Applications
Noor Amalina Ramli, Tughrul Arslan, Nakul Haridas
- Study
and realization of a fluidic thermal gyrometer
Guillaume Kock, Philippe Combette, Benoit Charlot, Alain Giani, Markus
Schneider, Caroline Gauthier-Blum
- Co-design
of an adaptive hyperspectral imager based on MEMS arrays: from proof of
principle to a research prototype
Julien Roul, Frdric Blanc, Simon Lacroix, Antoine Monmayrant
15:20-15:40
Poster Introduction
Devices & Components
Session
Chair: Romolo MARCELLI (CNR-IMM Roma)
- Developing
MEMS DC Electric Current Sensor for End-use Monitoring of DC Power
Supply: Part VI Corresponding Relationship between Sensitivity and
Magnetic Induction
Xuesong Shang, Yang Li, Huan Liu, Takeshi Kobayashi, Dong F. Wang,
Toshihiro Itoh, Ryutaro Maeda
- Dynamic
characterization of an electrothermal actuator devoted to discrete MEMS
positioning
Ismail Bouhadda, Abdenbi Mohand, Patrice Le Moal, Gilles Bourbon,
Philippe Lutz
- Design,
Fabrication and Characterization of RF MEMS Switches with Robust Contact
Marius Pustan, Raluca Muller, Corina Birleanu, Angela Baracu , Cristian
Dudescu, Radu Chiorean
- Design
of micro-fabricated thermal flow-rate sensor for water network
monitoring
Ferdous Shaun, Hugo Regina, William Cesar, Frederic Marty, Elyes
Nefzaoui, Tarik Bourouina
CAD &
Tests
Session
Chair: t.b.d.
- An
FEM Study of Die Attach Packaging Effect on Nanomechanical Si Optical
Filters
Seonho Seok, Dooyoung Hah
- A
Correct-by-Construction Design and Programming Approach for Open
Paper-based Digital Microfluidics
Georgi Tanev, Madsen Jan
- Extreme
Low Voltage Field Emission of SiC Nanowire
Meng Liu, Tie Li, Yuelin Wang
- Relative
humidity effect on pull-off forces in MEMS flexible structures measured
by AFM
Corina Birleanu, Marius Pustan , Raluca Muller, Cristian Dudescu,
Angela Baracu, Florina Rusu
15:45-16:00 Coffee Break
16:00-18:00 Poster Viewing / Exhibition
May 31st, 2017
08:30-09:00 Registration
09:00-10:00 "Miniaturized Gas Chromatography for Space
Exploration: a 50 years history"
by
Prof.
Cyril SZOPA (LATMOS &
Institut Universitaire de France)
Session Chair: Francis PRESSECQ
(CNES)
10:00-10:30 Coffee Break
10:30-12:30 Technical Sessions
Energy Harvesting
Session
Chair: Peter SCHNEIDER (Fraunhofer IIS/EAS, Dresden)
- Design
and Fabrication of a High-Power Energy Harvester Based on a Three-Ports
Comb Drive Mechanism for Large Displacement
Hiroaki Homma, Hiroyuki Mitsuya, Hisayuki Ashizawa, Gen Hashiguchi,
Hiroyuki Fujita, Hiroshi Toshiyoshi
- A
Broad-band Vibrational Energy Harvester Utilizing Symmetrical
Comb-Drives Coupled with Strong Charged Electret
Hiroyuki Mitsuya, Hisayuki Ashizawa , Daisuke Anai, Hiroaki Homma), Gen
Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi
- Development
of Wide-band Low-frequency MEMS Vibration Energy Harvester for Utility
Infrastructure Core Monitoring System
Lan Zhang, Ryohei Takei, Jian Lu, Natsumi Nakimoto, Takeshi Kobayashi,
Toshihiro Itoh
- New
type of energy harvester with electric double layer electrets
Shimpei Ono, Kazumoto Miwa, Jenna Iori, Hiroyuki Mirsuya, K. Ishibashi,
Chikako Sano, Hiroshi Toshiyoshi, Hiroyuki Fujita
- Optimization
of the fabrication of a low frequency energy harvester made of printed
PZT layers on a meander shape stainless substrate
Maria Isabel Rua, Helene Debda, Egon Fernandes, Sid Zarabi, David
Nairn, Lan Wei, Armaghan Salehian
Invited Session on "On-chip Micro Instruments
for analytical chemistry"
Session
Chair: t.b.d.
- A
Mems-based Gas Chromatograph Front-end for a Miniature Spectrometer
Arno Hoogerwerf, Guido Spinola Durante, Andrew Morse, Geraint Morgan,
Simeon Barber, Simon Sheridan, Ian Wright
- Micro
patterned test cell arrays for high-throughput battery materials
research
Robert Hahn, Marc Ferch, Katrin Hoeppner, Marco Queisser, Krystan
Marquardt, Giuseppe Antonio Elia
- Recent
Advances in Micro-Gas Chromatography - The opportunities and the
challenges
Imadeddine Azzouz, Frederic Marty, Tarik Bourouina
Devices & Components (Poster
Introduction)
Session
Chair: Giorgio DE PASQUALE (DIMEAS, Politecnico di Torino)
- Integrated
microscale cooling for concentrator solar cells
Balzs Plesz, Gbor Takcs, Pter G. Szab, Zsolt Kohri, Mrton
Nmeth, Gyrgy Bognr
- Developing
Actuation Mechanism for Stick-Slip Based Intelligent Mobile Displays
Ahmed Farooq, Philipp Weitz, Grigori Evreinov, Roope Raisamo, Dasuke
Takahata
- Design
of capacitive micromachined ultrasonic transducers (CMUTs) on a
flexible substrate for intravascular ultrasonography (IVUS) applications
Dooyoung Hah, Chang Han Je, Sung-Q Lee
Materials
& Processes (Poster
Introduction)
Session
Chair: t.b.d.
- Stresses evolution at high temperature (200C) in Copper/Alumina
(Cu/Al2O3) stack
Nicole Doumit, Bonaventure Danoumbe, Stephane Capraro, J.P. Chatelon,
Marie Franoise Blanc-Mignon, Guillaume Kermouche, J.J. Rousseau
- Reliability of Ball Grid Array Subjected to Temperature Cycling
Wei-Long Chen, Wan-Chun Chuang, Ben Tsai, Josh Su
- Microwave Broadband Characterization of Aging of SU-8 Polymer as
CPW Substrate
Romolo Marcelli, Andrea Lucibello, Giovanni Maria Sardi, Emanuela
Proietti, Giancarlo Bartolucci
- A Low Cost Patternable Packaging Technology for Biosensors
Anthony Buchoux, Ewen Blair, Tsiamis Andreas, Jamie R. K, Marland,
Stewart Smith
- Reconfigurable Behavior of CdTe Quantum Dots at Terahertz
Frequencies employing UV excitation
Clarissa Vazquez-Colon, Adrian Zepeda-Galvez, Daniel Shreiber, Arturo
Ayon
- Time and Temperature Dependent Mechanical behavior of Al/Ti Thin
Films Application for MEMS
Ming-Tzer Lin, Taiting Lin , Ang-Ting Tsai
- An investigation into the SiC anti-ablation Membrane of MEMS
microthrusters
Shouxu Wang, Jian Zhu
- Silicon micromachining at cryogenic temperature
Thomas Tillocher, Philippe Lefaucheux, Mohamed Boufnichel, Rmi Dussart
- Titanium microstructuring for implantable components
Edouard Laudrel, Thomas Tillocher, Yannick Meric, Philippe Lefaucheux,
Marion Woytasik, Fabrice Michel, Hadrien Philippe, Baptiste Rousset,
Bertrand Boutaud, Robert Michel, Elie Lefeuvre, Rmi Dussart
12:30-14:00 Lunch
14:00-15:00 "Development of New Electret Charging Methods
and Its Application to MEMS Energy Harvesters"
by
Prof.
Yuji SUZUKI
(The University of Tokyo)
Session Chair: Stewart SMITH (The University of Edinburgh)
15:00-17:00 Poster Viewing / Exhibition
17:00-22:00 Social Event
Jun 1st, 2017
09:00-09:15 Registration
09:15-10:15 Technical Sessions
Micro Energy Systems
Session
Chair: t.b.d.
- Development
of micro batteries based on micro fluidic MEMS packaging
Robert Hahn, Marc Ferch, Katrin Hoeppner, Marco Queisser, Krystan
Marquardt, Giuseppe Antonio Elia
- Synthesis
and characterization of the interaction of ZnO and CdTe
photoluminescent quantum dots for photovoltaic applications
Felipe Orona Magallanes, J Elias Pelayo Ceja, Ruben Ruelas, Emmanuel
Saucedo-Flores, Arturo Ayon
- Power
management system of a MEMS vibrational energy harvesting sensor node
under low vibration conditions
Wenjun Zhao, Hiroaki Homma, Hiroshi Toshiyoshi
Characterisation of materials and processes
Session
Chair: Aurelio SOMA (Politecnico di Torino)
- Aspect
ratio dependent etching in advanced Deep Reactive Ion Etching of quartz
Paul Chapellier, Pierrre Lavenus, Batrice Bourgeteau, Olivier Le
Traon, Bernard Dulmet , Claude Gageant
- Experimental
Characterization of Elastic-Plastic Behavior of MEMS Electroplated Gold
Specimens
Mubasher Saleem, Aurelio Som, Benno Margesin
- In-situ
electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin
getter films during thermal activation
Sylvain Lemettre, Sana Hammami, Alain Bosseboeuf, Philippe Coste, Johan
Moulin
10:15-10:45 Coffee Break
10:45-12:05 Technical Sessions
Physical Sensors
Session
Chair: Arturo AYON (Univ. of Texas at San Antonio)
- Localization
in Coupled Systems: Part II Consideration on Damping Issue in A
Mode-localized Cantilever Array
Xiaodong Li, Di Zhou, Rui Liu, Shuyi Liu, Xin Liu, Dong F. Wang
- Thin
Film Based Flexible Current Sensor Using a Micropatterned Cu Coil
Takahiro Yamashita, Ryutaro Maeda, Toshihiro Itoh
- PLL-FITC
Fluorescence Thermography on Dry Surfaces
Benoit Charlot, Rudy Desgarceaux, Fabrice Bardin, Alain Giani
Microfluidics, Bio & Chemical sensors
Session
Chair: Benoit CHARLOT (IES, University of Montpellier)
- Modeling
of structural-fluidic interactions for the design of digital MEMS
speakers in hearing aids
Vanessa Pedio, Giorgio De Pasquale, Aurelio Som, Libor Rufer, Skandar
Basrour
- Waste-aware
Fluid Volume Assignment for Flow-Based Microfluidic Biochips
Alexander Schneider, Paul Pop, Jan Madsen
- Microfluidic
flow-through chambers for higher performance
Pter Plovics, Ferenc Ender, Mrta Rencz
- Chemical
gas sensor based on a novel capacitive microwave flexible transducer
and composite polymer carbon nanomaterials
Prince Bahoumina, Hamida Hallil, Jean-Luc Lachaud, Aymen Abdelghani,
Kamel Frigui, Stephane Bila, Dominique Baillargeat, Philippe Coquet,
Carlos Paragua, Emmanuelle Pichonat, Henri Happy, Dominique Rebiere,
Corinne Dejous
12:05-12:30
Closing Session
12:30-14:00 Lunch
