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Roma - Italy, May 22nd - May 25th, 2018
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TECHNICAL PROGRAM
May 23rd, 2018

08:30-09:00 Registration & Welcome Coffee

09:10-09:25 Conference Opening

09:25-10:25 Invited Talk

Microfluidic approaches: a promising route towards liquid biopsy
Dr. Anne-Marie Gué, Senior Scientist, LAAS CNRS, Toulouse, France


10:25-10:55 Coffee Break

10:55-12:35 Technical Sessions

Characterization and Reliability

  • (16) On the Modelling and Placement of Bonding-pillar Holes in Multi-wafer, Vacuum-packaged MEMS
    Alabi BOJESOMO, Wajih SYED (Masdar Institute, Khalifa University - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates)

  • (23) Mechanical Domain Characterization of Piezoelectric Micromachined Ultrasonic Transducers by Digital Holographic Microscopy
    Numan SAEED, Jaime VIEGAS, Shadi KHAZAALEH (Masdar Institute, Khalifa University - United Arab Emirates)


  • (25) Temperature accelerated discharging process in SiÍx films with embedded CNTs for applications in MEMS switches
    Dimitrios BIRMPILIOTIS (University of Athens (NKUA) - Greece), George STAVRINIDIS, George KONSTANTINIDIS (IESL FORTH - Greece), George PAPAIOANNOU (University of Athens (NKUA) - Greece)

  • (70) Variation-aware Modelling of Micro-scale Piezoelectric Energy Harvesters
    Wajih SYED, Alabi BOJESOMO (Masdar Institute, Khalifa University - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates)
     







Invited Session on Microsystems Integration in Textiles

  • (79) The thickness and material optimization of flexible electronic packaging for functional electronic textile
    Menglong LI (University of southampton - United Kingdom), John TUDOR, Liu JINGQI, Komolafe ABIODUN, Russel TORAH, Steve BEEBY (University of Southampton - United Kingdom)

  • (80) Wearable system with embedded force sensors for neurologic rehabilitation trainings
    Giorgio DE PASQUALE, Leonardo MASTROTOTARO (Politecnico di Torino - Italy), Lorenzo PIA (Universit? di Torino - Italy), Dalila BURIN (Tohoku University - Japan)

  • (88) Textile Humidity Sensors
    Anne SCHWARZ-PFEIFFER (Hochschule NIederrhein University of Applied Science - Germany), Marina NORMANN, Maike RABE, Thomas GRETHE (Hochschule Niederrhein University of Applied Sciences - Germany)

  • (87) An Automated Process for Inclusion of Package Dies and Circuitry within a Textile Yarn
    Dorothy HARDY, Ioannis ANASTASOPOULOS, M-Nour NASHED, Carlos OLIVEIRA, Theodore HUGHES-RILEY (Nottingham Trent University - United Kingdom), Abiodun KOMOLAFE, John TUDOR, Russel TORAH, Steve BEEBY (University of Southampton - United Kingdom)

  • (82) Electrospun Polyurethane Microfiber Membrane on Conductive Textile for Water-supported Textile Electrode in Continuous ECG Monitoring Application
    THANIT APIWATTANADEJ (Nanyang Technological University - Singapore), Li ZHANG (Temasak Laboratories, Nanyang Technological University - Singapore), Holden LI (Nanyang Technological University - Singapore)


12:35-14:00 Lunch  

14:00-15:20 Technical Sessions

Microfluidics and Bio-MEMS

  • (27) A Novel Metering Component for Volume Management in Flow-Based Microfluidic Biochips
    Paul POP, Alexander R?diger SCHNEIDER, Madsen JAN (Technical University of Denmark - Denmark)


  • (77) Investigation of magnetic nanoparticle filling of microreactors
    Peter PALOVICS, Marta RENCZ (Budapest University of Technology and Economics - Hungary)


  • (8) Design and Fabrication Considerations, Numerical Modelling, and Testing of a MEMS Microgripper
    Marija CAUCHI, Ivan GRECH, Bertram MALLIA, Pierluigi MOLLICONE, Barnaby PORTELLI, Nicholas SAMMUT (University of Malta - Malta)





Multi-Scale and System-Level Modeling

  • (35) Reduced Order Model of a Hydrogel-based Microvalve with Pressure, Mass Flow and Concentration Correlations
    Philipp MEHNER, Anthony BECK, Andreas VOIGT, Uwe MARSCHNER, Andreas RICHTER (Technische Universitaet Dresden - Germany)

  • (54) Dynamic fault injection for system level simulation of MEMS - a design method for functional safety
    Tino BLOCHMANN (Fraunhofer Institute of Integrated Circuits - Germany), Stephan GERTH, Thomas MARKWIRTH, Peter SCHNEIDER, Roland JANCKE (Fraunhofer IIS/EAS - Germany)

  • (62) A finite element approach for modeling of cnt-polymer-composites for use in large-area pressure sensors
    Michael SCHIEBOLD (Chemnitz University of Technology - Germany), Jan MEHNER (TU Chemnitz, Germany - Germany)

  • (73) A generic model for sensor simulation at system level
    Josue RIVERA VELAZQUEZ (LIRMM / University of Montpellier - France), Frederick MAILLY (LIRMM - France), Pascal NOUET (LIRMM / University Montpellier - France)

15:20-16:30   Poster Introduction


16:30-17:00   Coffee Break

16:30-18:30   Poster Viewing / Exhibition

18:00-19:30   Sponsors Welcome Reception


May 24th, 2018

08:45-09:00   Registration

09:00-10:00   Plenary Session 2


Challenges in Modeling and Simulation of Inertial MEMS
Prof. Dr.-Ing. habil. Jan Mehner, Chemnitz University of Technology, Microsystems and Biomedical Engineering
Chemnitz, Germany




10:00-10:30   Coffee Break

10:30-12:30 Technical Sessions

Resonant MEMS Devices

 
  • (10) A high Q 2D-Length Extension Mode Resonator for potential Time-Frequency applications
  • Paul CHAPELLIER, Pierrre LAVENUS (ONERA - France), Bernard DULMET (Femto-ST - France)



  • (20) Resolution of phase difference and frequency measurements of mutually injection-locked oscillators for resonant sensing applications
  • Jerome JUILLARD (CentraleSupelec - France), Pierre PRACHE, Pietro MARIS FERREIRA (GEEPS - France), Nuria BARNIOL (Universitat Autonoma de Barcelona - Spain) 


  • (22) Compact On-chip Bandpass Filter With Low Insertion Loss For 60-GHz SIP Application
  • Linpu LI, Jinyi DING, Xiaowei SUN (SIMIT - China) 



  • (37) Super-harmonic oscillation in coupled copper cantilevers applicable to sensor devices
  • Dong F. WANG, Guowen ZHENG (Jilin University - China) 


  • (60) Temperature Compensation of AlScN (17.5%) Contour Mode Resonators
  • Andrea LOZZI (École polytechnique fédérale de Lausanne - Switzerland), Ernest TING-TA YEN (Kilby Labs Texas Instruments Inc. - United States), Paul MURALT, Guillermo VILLANUEVA (EPFL - Switzerland 








Energy Harvesting / Micro-Energy

 
  • (44) Influence of Photoluminescent Si and ZnO QD multilayered films on solar cell efficiency.
  • Alejandra CORDOVA, Rosendo LOPEZ-DELGADO (University of Texas at San Antonio - United States), Aldo ZAZUETA RAYNAUD (UTSA - United States), Arturo AYON (Univ. of Texas at San Antonio, USA - United States), Mario Enrique ALVAREZ-RAMOS (Universidad de Sonora - Mexico)

  • (61) ZnS Quantum Dots coated with PVP to Enhance Solar Cell Performance
  • Julio MELENDRES SANCHEZ, Alejandra CORDOVA, Rosendo LOPEZ-DELGADO (University of Texas at San Antonio - United States), Mario Enrique ALVAREZ-RAMOS (Universidad de Sonora - Mexico), Arturo AYON (Univ. of Texas at San Antonio, USA - United States)

  • (64) Low temperature sealing of substrate integrated micro batteries
  • Robert HAHN (Fraunhofer - Germany), Marc FERCH, Stefan TURTA (TU Berlin - Germany), Dominik WANKE, Felix KRAUSE (Fraunhofer - Germany), Andreas FROEBE (TU Berlin - Germany), Tobias KOB (Fraunhofer - Germany), Klaus-Dieter LANG (TU Berlin - Germany)

  • (75) A Flexible Triboelectric Nanogenerator based on Electrospun PVDF Nanofibers and PDMS Film with Patterned Microstructures
  • CHENG-HSIN CHUANG, Yu-Bin HUANG, Deng-Maw LU, Cheng-Chien WANG, Muhammad Omar SHAIKH (Southern Taiwan University of Science and Technology - Taiwan)

  • (76) A Micromachined All-Solid On-Chip Thin-Film Battery towards Uninterruptible Photovoltaic Cells
  • Taisei KURIYAMA, Yuki OKAMOTO (The University of Tokyo - Japan), Akiyoshi SUZUKI (ULVAC, Inc. - Japan), Yoshio MITA (Univ. Tokyo Japan - Japan)

  • (83) Electrostatic vibration energy harvester using Multimodal-shaped springs for pacemaker application
  • Bogdan VYSOTSKYI (Centre for Nanoscience and Nanotechnology (C2N) - France), Denis AUBRY (MSSMat - France), Fabien PARRAIN (Institut d'Electronique Fondamentale - France), Philippe GAUCHER (MSSMat - France), Xavier LE ROUX (Centre for Nanoscience and Nanotechnology (C2N) - France), Elie LEFEUVRE (University of Paris Sud - France)

12:30-14:00 Lunch  

14:00-15:20 Technical Sessions

Design Automation and Nano-Lithography

 
  • (6) Analytical design of linear variable capacitors with shaped-finger comb-drive actuators
  • Dooyoung HAH (Abdullah Gul University - Turkey) 


  • (63) Talbot Lithography with soft elastomeric conformal phase masks
  • Rudy DESGARCEAUX (IES Institut d'électronique et des systèmes - France), Zhanna SANTYBAYEVA, Francesco PEDACI (CBS/INSERM - France), Benoit CHARLOT (CNRS University Montpellier - France) 

  • (72) An automated synthesis strategy for efficient design and layout of accelerometers
  • Steffen MICHAEL, Maria KELLNER, Jenny KLAUS (IMMS - Germany), Ralf SOMMER (TU Ilmenau - Germany)
Design and Modeling

 
(19) High Dynamic Range Z-axis Hybrid Spring MEMS Capacitive Accelerometer
Zakriya MOHAMMED (Masdar Institute, Khalifa University of Science and Technology - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates), Mahmoud RASRAS (New York University - United Arab Emirates)

(28) Air Damping Analysis in Resonating Micro-Mirrors
Russell FARRUGIA, Barnaby PORTELLI, Ivan GRECH, Duncan CAMILLERI, Owen CASHA, Joseph MICALLEF, Edward GATT (University of Malta - Malta) •

(74) Post-fabrication soft trimming of resistive sensors
Ibrahim SHANKHOUR (LIRMM - France), Jad MOHDAD (LIRMM/CNRS - University of Montpellier - France), Frederick MAILLY (LIRMM - France), Pascal NOUET (LIRMM / University Montpellier - France)


15:00-16:10   Poster Introduction

  • (58) A Modular Reconfigurable Digital Microfluidics Platform Georgi TANEV, Winnie SVENDSEN (Technical University of Denamrk - Denmark), Madsen JAN (Technical University of Denmark - Denmark)

  • (21) Measurement uncertainties in electrostatic actuated MEMS resonators Faisal IQBAL, byeungleul LEE (Korea University of Technology and Education - Korea, Republic of)

  • (57) An FEM Study of Viscoelasticity Effect on Debonding Process for Polymer-Cap Transfer Packaging Seonho SEOK (C2N-Orsay - France)

  • (34) Automated Reduced Order Model Generation for MEMS Jan MEHNER, David KRIEBEL, Henry SCHMIDT, Markus FREITAG (TU Chemnitz, Germany - Germany)

  • (32) FPGA Sensor Fusion System Design for IMU Arrays Owais WAHEED (Khalifa University - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates)

  • (15) Suppression Activity Analysis of 5-LOX from Chinese Herbal Extracts by Designed 3D Array Microfluidic Chip Yi XU, Xi SU, Xiaodan ZHANG, Li CHEN (Chongqing University - China)

  • (29) Long term characterization of microelectrodes for neural stimulation applications Pedro GONZáLEZ LOSADA, Lionel ROUSSEAU, Gaelle LISSORGUES (ESIEE Paris - France)

  • (53) A fully polymeric field-flow separation module for Lab on Chip applications Viviana MULLONI (FBK - Italy), Andrea CAPUANO (Universit? di Trento - Italy), Andrea ADAMI, Collini CRISTIAN (FBK - Italy), Alberto QUARANTA (Universit? di Trento - Italy)

  • (85) Ordered Arrays of Uniform High-aspect-ratio Al2O3 Nanotube: Fabrication and Characterization hailiang LI, yilei HUA, changqing XIE (Institute of Microelectronics, Chinese Academy of Sciences - China)

  • (13) Enhanced Stokes Shift due to the Interaction of Photoluminescent Carbon and CdTe Quantum Dots and their Influence on Silicon Solar Cell Performance J Elias PELAYO CEJA (Universidad de Guadalajara - Mexico), Aldo ZAZUETA RAYNAUD (UTSA - United States), Rosendo LOPEZ-DELGADO (University of Texas at San Antonio - United States), Emmanuel SAUCEDO-FLORES, Ruben RUELAS (University of Guadalajara - Mexico), Felipe ORONA MAGALLANES, Rogelio GUERRERO (University of Texas at San Antonio - United States), Arturo AYON (Univ. of Texas at San Antonio, USA - United States)

  • (9) Sub-µm air-gap resonant MEMS mass sensors fabrication for the detection of bioaerosols Ugur SOYSAL (Universite Paris-Est - France), Frederci MARTY (ESIEE Paris - France), Emmanuelle ALGRE (ESYCOM, ESIEE Paris - France), Evelyne GEHIN (Universite Paris-Est, CERTES (EA3481), 61 Avenue du General de Gaulle, 94010 Creteil Cedex, France - France), Charles MOTZKUS (CSTB, 4 Avenue Jean Jaures, Champs-sur-Marne, 77447 Marne-la-Vallee Cedex 2, France - France)

  • (36) A self-powered tri-axial piezoelectric accelerometer with an error compensation method Dong F. WANG, Yifan ZHU (Jilin University - China)

  • (39) Sensitivity Characterization in a Mode-localized Cantilever Trio for Picogram Order Mass Detection Dong F. WANG, Jing HONG (Jilin University - China)

  • (65) Realization and study of a thermal gyroscope based on thermal expansion Guillaume KOCK (Institut d'Electronique et des Systèmes - France), COMBETTE PHILIPPE (IES - Institut d'Electronique et des Syst?mes - France), Benoit CHARLOT (CNRS/University Montpellier - France), Alain GIANI (IES - France)


16:10-16:40   Coffee Break

16:10-18:10   Poster Viewing / Exhibition

18:30-22:00   Social Event


May 25th, 2018

09:00-09:15   Registration

09:15-10:15   Technical Sessions

Fluidic Sensors

  • (5) Micro Blood Flow Sensor with Built-in Contact Pressure and Temperature Sensors Renshi SAWADA, Hirofumi NOGAMI, Ryo INOUE (Kyushu University - Japan), Eiji HIGURASHI (University of Tokyo - Japan)




  • (68) Frequency stability in PZE-actuated Suspended Microchannel Resonators Annalisa DE PASTINA, Damien MAILLARD, Guillermo VILLANUEVA (EPFL - Switzerland)






  • (69) Energy efficient micro-machined thermal flow-rate sensor based on transient operation mode Ferdous SHAUN, Sreyash SARKAR, Patrick POULICHET, Francesco PERESSUTTI (ESIEE-Paris - France), Frederci MARTY (ESIEE Paris - France), Jo?o OLIVEIRA (Universidade De Nova Lisbon- UNL - Portugal), Tarik BOUROUINA, Elyes NEFZAOUI (ESIEE Paris - France)
Invited Session on MEMS for Space Applications

  • (91) Digital electronics for inertial MEMS and space applications Jean GUERARD, Léopold DELAHAYE (ONERA - France), Raphael LEVY (Onera - France)

  • (89) MEMS gyroscope for miniaturized space attitude control system Boo Hyun AN (Masdar Insititute of Science and Technology, as a part of Khalifa University of Science and Technology - United Arab Emirates), Mariam MANSOURI (Masdar Insititute of Science and Technology, a part of Khalifa University of Science and Technology - United Arab Emirates), Wajih SYED (Masdar Institute, Khalifa University - United Arab Emirates), Sultan ALDAHMANI (United Arab Emirates Space Agency, Space Missions? Science and Technology Directorate - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates), Daniel CHOI (Masdar Insititute of Science and Technology, a part of Khalifa University of Science and Technology - United Arab Emirates)

  • (90) Long-Term Actuation Demonstration of RF-MEMS Switches for Space Applications Abedel Halim ZAHR, Ling Yan ZHANG, Cl?ment DORION, Antoine DEVEAUTOUR, Aur?lien BENETEAU, Romain STEFANINI (AirMEMS - France), Pierre BLONDY (XLIM - France), Frederic COURTADE, Kateryna KIRYUKHINA (CNES - France), Francis PRESSECQ (CNES, Toulouse, France - France)

10:15-10:45   Coffee Break

10:45-12:05   Technical Sessions

Physical Actuators/Sensors

(66) Smart Ping Pong Racket by Ultrathin Piezoelectric Strain Sensor Array
Takahiro YAMASHITA (National Institute of Advanced Industrial Science and Technology - Japan)



(78) A polymeric microtweezer with integrated force/displacement sensor
Rodica-Cristina VOICU (National Institute for R&D in Microtechnologies - Romania)




(45) Nonlinear spring turning by electrostatic combs in micro mirror scanner
Kazuhiro HANE (Tohoku University, Japan - Japan), Takashi IZAWA, Takashi SASAKI (Tohoku University - Japan)


(43) A Passive Optoelectric AC/DC Electric Current Sensor for Diverse Multi-wire Cables
Dong F. WANG, Ziqi ZHAO (Jilin University - China)




Chemical and Optical Sensing

  • (4) Detection of TNT in Sulfuric Acid Solution by SiNWs-FET based Sensor
  • Hui WANG, Shixing CHEN, Anran GAO (Shanghai Institute of Microsystem and Information Technology - China), Yuelin WANG (SIMIT, Shanghai, China - China), Tie LI (Shanghai Institute of Microsystem and Information Technology - China)

  • (7) Micro-optrode with integrated thermal and electrophysiological recording sites and infrared waveguide for monitoring and stimulation of the neural tissue
  • Agoston HORVATH (Pazmany Peter Catholic University - Hungary), Csanad BOROS, Ors SEPSI, Szabolcs BELEZNAI, Pal KOPPA (Budapest University of Technology & Economics - Hungary), Zoltan FEKETE (Pazmany Peter Catholic University - Hungary)

  • (55) CNT-BASED EMBG RESONATOR FOR CO2 GAS DETECTION
  • Alina CISMARU, Martini ALDRIGO (IMT - Bucharest - Romania), Cosmin OBREJA (National Institute for R&D in Microtechnologies - Romania), Mircea DRAGOMAN (IMT - Bucharest - Romania)

  • (56) Active control of light extraction in the NIR range with sub-wavelength periodic structures Anatole HELIOT (Essilor International - France),
  • Henri CAMON (LAAS - France), Olivier GAUTHIER-LAFAYE (LAAS-CNRS - France), Antoine MONMAYRANT (LAAS/CNRS - France), Sylvain PELLOQUIN, Thierry GACOIN (LAAS-CNRS - France), Khalid LAHLIL, Lucio MARTINELLI (PMC- Polytechnique - France), Claudine BIVER, Samuel ARCHAMBEAU (ESSILOR International - France)

12:10-12:30   Closing Session

12:30-14:00   Lunch

14:30-18:00   Visit of Laboratory & Facilities

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