This Conference will bring together researchers, engineers and practitioners involved in the development of CAD tools and design methodologies for MEMS and MOEMS. Topics of Interest
DESIGN: Mechanical simulation, Model order reduction, Multi-physics & Multi-domain simulations, Numerical simulation, other design issues, Signal processing & Front-ends, Thermal evaluation TEST: Failure mechanisms, Fault modelling, Fault simulation and test pattern generation, Yield estimation DEVICES & COMPONENTS: RF MEMS, MOEMS, energy harvesting, bio and fluidics, Inertial and Resonant sensors, other sensors & actuators Technical Program Committee |
This Conference will bring together researchers, engineers and practitioners involved in the development of integration technologies and packaging for MEMS and MOEMS. Topics of Interest
INTEGRATION: flexible technologies and printed electronics, co-integration between MEMS and electronics, 3D technologies PACKAGING: MOEMS, RF and microwave, vacuum and other harsh environments, others MATERIALS: piezoelectric, PDMS, others CHARACTERIZATION: dimensional measurements, non-destructive evaluation, PCM & test structures, physical measurements, reliability and failure analysis DEVICES & COMPONENTS: RF MEMS, MOEMS, energy harvesting, bio and fluidics, Inertial and Resonant sensors, other sensors & actuators Technical Program Committee
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