09:10-09:25 Conference Opening
09:25-10:25 Invited Talk
Microfluidic
approaches: a promising route towards liquid biopsy
Dr. Anne-Marie Gué, Senior Scientist, LAAS CNRS, Toulouse, France
Session chair: Stewart Smith, The University of Edinburgh
Dr. Anne-Marie Gué, Senior Scientist, LAAS CNRS, Toulouse, France
Session chair: Stewart Smith, The University of Edinburgh
10:55-12:35 Technical Sessions
Session chair: Francis PRESSECQ, CNES, Toulouse
|
Session chair: Russel TORAH, University of Southampton
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12:35-14:00 Lunch
14:00-15:20 Technical Sessions
Session chair: Giorgio DE PASQUALE, Politecnico di Torino
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Session chair: Aurelio SOMA, Politecnico di Torino
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15:20-16:15 Poster Introduction
Session chair: Marta RENCZ, BME, Budapest
- (38) A passive piezoelectric AC current sensor for
three-phase
four-wire appliances under symmetrical loads
Dong F. WANG, YiPeng HOU (Jilin University - China)
- (47) Integrated thermally actuated MEMS switch with the
signal
line
for
the out-of-plane actuation
Marius PUSTAN, Corina BIRLEANU, Cristian DUDESCU (Technical University of Cluj-Napoca - Romania), Raluca MULLER (IMT Bucharest - Romania), Angela BARACU (National Institute for R&D in Microtechnologies - IMT Bucharest - Romania)
- (14) A Multiband RF MEMS Switch with Low Insertion Loss
and
CMOS-compatible Pull-in Voltage
Alabi BOJESOMO, Numan SAEED (Masdar Institute, Khalifa University - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates)
Montserrat FERNANDEZ-BOLAñOS BADIA, Andrei MULLER (EPFL - Switzerland), Josef WEBER, Peter RAMM (Fraunhofer EMFT - Germany)
- (59) Force sensitive smart laparoscope of Robin Heart
Surgical
Robot
János RADó (HAS Centre for Energy Research, Institute of Technical Physics and Materials Science - Hungary), Csaba D?CS?, P?ter F?LDESY (HAS Centre for Energy Research, Institute of Technical Phisics and Materials Science - Hungary), Kamil ROHR, Zbigniew NAWRAT (Foundation of Cardiac Surgery Development, Biocybernetics Laboratory - Poland), G?bor SZEB?NYI, Hunor S?NTHA (Budapest University of Technology and Economics - Hungary), Peter FURJES (HAS Centre for Energy Research - Hungary)
- (71) SYNERGISTIC PHOTOLUMINESCENT INTERACTION OF Si AND
CdTe
QUANTUM
DOTS
Janeth GARCIA-MONGE, Clarissa VAZQUEZ-COLON (University of Texas at San Antonio - United States), Arturo AYON (Univ. of Texas at San Antonio, USA - United States)
- (31) Graphene electrodes for piezoelectric resonators
Amina SAADANI, Pierrre LAVENUS (ONERA - France), olivier LE TRAON (onera - France), Fabrice STHAL (FEMTO-ST, CNRS, ENSMM - France)
- (17) A New Technique for Creating Curved Interior Holes
on
Ultrathin
Glass Based on Picosecond Laser Drilling and Thermo-Shock Separation
Kuo-Shen CHEN (Taiwan - Taiwan), Chiao-Fen CHUANG (NCKU - Taiwan)
- (51) An all screen-printed free-standing piezoelectric
diaphragm
for
application on textile
Nursabirah JAMEL (University Malaysia Perlis - Malaysia), Russel TORAH, Kai YANG, John TUDOR, Steve BEEBY (University of Southampton - United Kingdom)
- (81) Improving the integration of e-textile microsystems
encapsulation
by modifying PDMS formulation.
Olivia OJUROYE, Russel TORAH, Steve BEEBY (University of Southampton - United Kingdom)
- (86) Wafer-scale x-ray diffraction grating based on
SiC
membrane
window
changqing XIE, hailiang LI, yilei HUA (Institute of Microelectronics, Chinese Academy of Sciences - China)
- (10) A high Q 2D-Length Extension Mode Resonator for
potential Time-Frequency applications
- Paul CHAPELLIER, Pierrre LAVENUS (ONERA - France),
Bernard
DULMET (Femto-ST - France)
- (20) Resolution of phase difference and frequency
measurements of mutually injection-locked oscillators for resonant
sensing applications
- Jerome JUILLARD (CentraleSupelec - France), Pierre PRACHE, Pietro MARIS FERREIRA (GEEPS - France), Nuria BARNIOL (Universitat Autonoma de Barcelona - Spain)
- (22) Compact On-chip Bandpass Filter With Low Insertion
Loss For 60-GHz SIP Application
- Linpu LI, Jinyi DING, Xiaowei SUN (SIMIT - China)
- (37) Super-harmonic oscillation in coupled copper
cantilevers applicable to sensor devices
- Dong F. WANG, Guowen ZHENG (Jilin University - China)
- (60) Temperature Compensation of AlScN (17.5%) Contour
Mode
Resonators
- Andrea LOZZI (École polytechnique fédérale de Lausanne -
Switzerland), Ernest TING-TA YEN (Kilby Labs Texas Instruments Inc. -
United States), Paul MURALT, Guillermo VILLANUEVA (EPFL -
Switzerland
- (44) Influence of Photoluminescent Si and ZnO QD
multilayered films on solar cell efficiency - Alejandra CORDOVA,
Rosendo LOPEZ-DELGADO, Aldo ZAZUETA RAYNAUD, Arturo AYON (Univ. of
Texas at San Antonio, USA -
United States), Mario Enrique ALVAREZ-RAMOS (Universidad de Sonora -
Mexico)
- (61) ZnS Quantum Dots coated with PVP to Enhance Solar
Cell
Performance
- Julio MELENDRES SANCHEZ, Alejandra CORDOVA, Rosendo
LOPEZ-DELGADO (University of Texas at San Antonio - United States),
Mario Enrique ALVAREZ-RAMOS (Universidad de Sonora - Mexico), Arturo
AYON (Univ. of Texas at San Antonio, USA - United States)
- (76) A Micromachined All-Solid On-Chip Thin-Film Battery
towards Uninterruptible Photovoltaic Cells
- Taisei KURIYAMA, Yuki OKAMOTO (The University of Tokyo -
Japan), Akiyoshi SUZUKI (ULVAC, Inc. - Japan), Yoshio MITA (Univ. Tokyo
Japan - Japan)
- (83) Electrostatic vibration energy harvester using
Multimodal-shaped springs for pacemaker application
- Bogdan VYSOTSKYI (Centre for Nanoscience and
Nanotechnology
(C2N) - France), Denis AUBRY (MSSMat - France), Fabien PARRAIN
(Institut d'Electronique Fondamentale - France), Philippe GAUCHER
(MSSMat - France), Xavier LE ROUX (Centre for Nanoscience and
Nanotechnology (C2N) - France), Elie LEFEUVRE (University of Paris Sud
- France)
- (6) Analytical design of linear variable capacitors with
shaped-finger comb-drive actuators
- Dooyoung HAH (Abdullah Gul University - Turkey)
- (63) Talbot Lithography with soft elastomeric conformal
phase masks
- Rudy DESGARCEAUX (IES Institut d'électronique et des systèmes - France), Zhanna SANTYBAYEVA, Francesco PEDACI (CBS/INSERM - France), Benoit CHARLOT (CNRS University Montpellier - France)
16:15-18:15 Poster Viewing / Exhibition
18:00-19:30 Sponsors Welcome Reception
09:00-10:00 Invited Talk
Challenges in Modeling and Simulation of Inertial MEMS
Prof. Dr.-Ing. habil. Jan Mehner, Chemnitz University of Technology, Microsystems and Biomedical Engineering
Chemnitz, Germany
Session chair: Peter Schneider, Fraunhofer IIS/EAS, Dresden
10:30-12:10 Technical Sessions
Session chair: John TUDOR, University of Southampton |
Session chair: Dong F. WANG, Jilin Univ., Changchun |
13:45-14:45 Technical Sessions
Session chair: Raluca MULLER, IMT - Bucharest |
Session chair: Jerôme JUILLARD, Supélec Zakriya MOHAMMED (Masdar Institute, Khalifa University of Science and Technology - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates), Mahmoud RASRAS (New York University - United Arab Emirates) (28) Air Damping Analysis in Resonating Micro-Mirrors Russell FARRUGIA, Barnaby PORTELLI, Ivan GRECH, Duncan CAMILLERI, Owen CASHA, Joseph MICALLEF, Edward GATT (University of Malta - Malta) • (74) Post-fabrication soft trimming of resistive sensors Ibrahim SHANKHOUR (LIRMM - France), Jad MOHDAD (LIRMM/CNRS - University of Montpellier - France), Frederick MAILLY (LIRMM - France), Pascal NOUET (LIRMM / University Montpellier - France) |
14:45-15:40 Poster Introduction
- (39) Sensitivity Characterization in a Mode-localized Cantilever Trio for Picogram Order Mass Detection Dong F. WANG, Jing HONG (Jilin University - China)
- (21) Measurement uncertainties in electrostatic actuated MEMS resonators Faisal IQBAL, byeungleul LEE (Korea University of Technology and Education - Korea, Republic of)
- (65) Realization and study of a thermal gyroscope based on thermal expansion Guillaume KOCK, COMBETTE PHILIPPE, Benoit CHARLOT, Alain GIANI (IES, University of Montpellier/CNRS - France)
- (34) Automated Reduced Order Model Generation for MEMS Jan MEHNER, David KRIEBEL, Henry SCHMIDT, Markus FREITAG (TU Chemnitz, Germany - Germany)
- (32) FPGA Sensor Fusion System Design for IMU Arrays Owais WAHEED (Khalifa University - United Arab Emirates), Ibrahim ELFADEL (Masdar Institute at Khalifa University of Science andTechnology - United Arab Emirates)
- (15) Suppression Activity Analysis of 5-LOX from Chinese Herbal Extracts by Designed 3D Array Microfluidic Chip Yi XU, Xi SU, Xiaodan ZHANG, Li CHEN (Chongqing University - China)
- (29) Long term characterization of microelectrodes for neural stimulation applications Pedro GONZáLEZ LOSADA, Lionel ROUSSEAU, Gaelle LISSORGUES (ESIEE Paris - France)
- (13) Enhanced Stokes Shift due to the Interaction of Photoluminescent Carbon and CdTe Quantum Dots and their Influence on Silicon Solar Cell Performance J Elias PELAYO CEJA (Universidad de Guadalajara - Mexico), Aldo ZAZUETA RAYNAUD, Rosendo LOPEZ-DELGADO (University of Texas at San Antonio - United States), Emmanuel SAUCEDO-FLORES, Ruben RUELAS (University of Guadalajara - Mexico), Felipe ORONA MAGALLANES, Rogelio GUERRERO, Arturo AYON (Univ. of Texas at San Antonio, USA - United States)
- (9) Sub-µm air-gap resonant MEMS mass sensors fabrication for the detection of bioaerosols Ugur SOYSAL (Universite Paris-Est - France), Frederci MARTY (ESIEE Paris - France), Emmanuelle ALGRE (ESYCOM, ESIEE Paris - France), Evelyne GEHIN (Universite Paris-Est, CERTES (EA3481), 61 Avenue du General de Gaulle, 94010 Creteil Cedex, France - France), Charles MOTZKUS (CSTB, 4 Avenue Jean Jaures, Champs-sur-Marne, 77447 Marne-la-Vallee Cedex 2, France - France)
- (36) A self-powered tri-axial piezoelectric accelerometer with an error compensation method Dong F. WANG, Yifan ZHU (Jilin University - China)
- (85) Ordered Arrays of Uniform High-aspect-ratio Al2O3 Nanotube: Fabrication and Characterization hailiang LI, yilei HUA, changqing XIE (Institute of Microelectronics, Chinese Academy of Sciences - China)
- (5) Blood Flow Sensor with Built-in Contact Pressure and Temperature Sensor
- Renshi SAWADA, Hirofumi NOGAMI, Ryo INOUE (Kyushu University - Japan), Eiji HIGURASHI (University of Tokyo - Japan)
- (68) Frequency stability in PZE-actuated Suspended Microchannel Resonators Annalisa DE PASTINA, Damien MAILLARD, Guillermo VILLANUEVA (EPFL - Switzerland)
- (69) Energy efficient micro-machined thermal flow-rate
sensor based
on transient operation mode
Ferdous SHAUN, Sreyash SARKAR, Patrick POULICHET, Francesco PERESSUTTI, Frederci MARTY (ESIEE Paris - France), Joao OLIVEIRA (Universidade De Nova Lisbon- UNL - Portugal), Tarik BOUROUINA, Elyes NEFZAOUI (ESIEE Paris - France) - (89) MEMS gyroscope for miniaturized space attitude
control
system
- Boo Hyun AN,
Mariam MANSOURI,
Wajih SYED, Ibrahim ELFADEL, Daniel
CHOI (Masdar Institute, Khalifa University - United Arab
Emirates), Sultan ALDAHMANI (United Arab Emirates Space Agency, Science
and Technology Directorate - United Arab Emirates)
- (90) Long-Term Actuation Demonstration of RF-MEMS
Switches
for Space Applications
Abedel Halim ZAHR, Ling Yan ZHANG, Clément DORION, Antoine DEVEAUTOUR, Aurélien BENETEAU, Romain STEFANINI (AirMEMS - France), Pierre BLONDY (XLIM - France), Frederic COURTADE, Kateryna KIRYUKHINA (CNES - France), Francis PRESSECQ (CNES, Toulouse, France - France)
- (91) Digital electronics for inertial MEMS and space
applications
- Jean GUERARD, Léopold DELAHAYE, Raphael LEVY (Onera - France)
- (4) Detection of TNT in Sulfuric Acid Solution by
SiNWs-FET
based Sensor
- Hui WANG, Shixing CHEN, Anran GAO (Shanghai Institute of Microsystem and Information Technology - China), Yuelin WANG (SIMIT, Shanghai, China - China), Tie LI (Shanghai Institute of Microsystem and Information Technology - China)
- (7) Micro-optrode with integrated thermal and
electrophysiological recording sites and infrared waveguide for
monitoring and stimulation of the neural tissue
- Agoston HORVATH (Pazmany Peter Catholic University - Hungary), Csanad BOROS, Ors SEPSI, Szabolcs BELEZNAI, Pal KOPPA (Budapest University of Technology & Economics - Hungary), Zoltan FEKETE (Pazmany Peter Catholic University - Hungary)
- (55) CNT-BASED EMBG RESONATOR FOR CO2 GAS DETECTION
- Alina CISMARU, Martini ALDRIGO (IMT - Bucharest - Romania), Cosmin OBREJA (National Institute for R&D in Microtechnologies - Romania), Mircea DRAGOMAN (IMT - Bucharest - Romania)
- (56) Active control of light extraction in the NIR range
with sub-wavelength periodic structures
Anatole HELIOT (Essilor International - France),
- Henri CAMON (LAAS - France), Olivier GAUTHIER-LAFAYE (LAAS-CNRS - France), Antoine MONMAYRANT (LAAS/CNRS - France), Sylvain PELLOQUIN, Thierry GACOIN (LAAS-CNRS - France), Khalid LAHLIL, Lucio MARTINELLI (PMC- Polytechnique - France), Claudine BIVER, Samuel ARCHAMBEAU (ESSILOR International - France)
15:45-17:45 Poster Viewing / Exhibition
18:30-22:00 Social Event
09:00-09:15 Registration
09:15-10:15 Technical Sessions
Session chair: Henri CAMON, LAAS-CNRS, Toulouse |
Session chair: Ibrahim (Abe) M. ELFADEL, Khalifa University of Science and Technology, Abu Dhabi |
10:15-10:45 Coffee Break
10:45-12:05 Technical Sessions
Session chair: Yoshio Mita, The University of Tokyo Takahiro YAMASHITA (National Institute of Advanced Industrial Science and Technology - Japan) (78) A polymeric microtweezer with integrated force/displacement sensor Rodica-Cristina VOICU (National Institute for R&D in Microtechnologies - Romania) (45) Nonlinear spring turning by electrostatic combs in micro mirror scanner Kazuhiro HANE (Tohoku University, Japan - Japan), Takashi IZAWA, Takashi SASAKI (Tohoku University - Japan) (43) A Passive Optoelectric AC/DC Electric Current Sensor for Diverse Multi-wire Cables Dong F. WANG, Ziqi ZHAO (Jilin University - China) |
Session chair: Tie LI, SIMIT, CAS, Shanghai |
12:10-12:30 Closing Session
12:30-14:00 Lunch
14:30-18:00 Visit of Laboratory & Facilities