The complete Program can be viewed online here
Program Chairs:
- Computer-Aided Design, Design and Test Conference: Peter Schneider (Fraunhofer IIS/EAS, Dresden, Germany) and Francis Pressecq (CNES, France)
- Microfabrication, Integration and Packaging Conference: Stewart Smith (The University of Edinburgh, Scotland) and Yoshio Mita (The University of Tokyo, Japan)
- "MEMS devices in standard processes": Gerold Schropfer - gschropfer@coventor.com - Coventor Inc.
PLENARY INVITED SPEAKERS
"Physically-based virtual prototyping of MEMS: The ‘virtual microtransducer fab’ revisited" by Prof. Dr. Gabriele SCHRAG, Technical University of Munich, Chair for Physics of Electrotechnology
ABSTRACT: Today’s mature fabrication processes enable a very high integration of components leading to systems with enhanced functionality and complexity. The design and optimization of such microsystems have to be supported extensively by a proper system design in order to ensure short time to market. A good 20 years after the proposal of the ‘virtual microtransducer fab’*, we visit this concept again, discuss the state-of-the-art of and current approaches to a physics-based and predictive MEMS design and illustrate them for selected applications. (* G. Wachutka: Tailored modeling: The way to ‘virtual microtransducer fab’?, Sensors and Actuators A, Vol. 47, 1995) |
ABSTRACT: This talk presents the combination of “bottom-up” layer-by-layer (LbL) nano self-assembly and “top-down” micromanufacturing techniques to fabricate graphene MEMS and electronics for biomedical applications. With nano self-assembly and surface micromachining, highly flexible graphene-based beam platform for micro sensing and actuation was fabricated and investigated successfully with a potential for biomedical applications. |