Computer-Aided Design, Design and
Test
- Chair: Peter Schneider, Fraunhofer
IIS/EAS, Dresden, Germany
- Co-Chair: Francis Pressecq, CNES, France
This Conference will bring together researchers, engineers
and practitioners involved in the development of CAD tools and design
methodologies for MEMS and MOEMS.
Topics of Interest
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Microfabrication, Integration and
Packaging
- Chair: Yoshio Mita, University of Tokyo,
Japan
- Co-Chair: Niels Tas, MESA+ Institute for
Nanotechnology, Twente, NL
This Conference will bring together researchers, engineers
and practitioners involved in the development of integration
technologies and packaging for MEMS and MOEMS.
Topics of Interest
- MICROFABRICATION:
assembly technologies, microlithography issues for
MEMS/MOEMS, micromachining, micro-molding, nano-imprint,
embossing, others
INTEGRATION: flexible technologies and printed electronics,
co-integration between MEMS and electronics, 3D technologies
PACKAGING: MOEMS, RF and microwave, vacuum and other harsh
environments, others
MATERIALS: piezoelectric, PDMS, others
CHARACTERIZATION: dimensional measurements, non-destructive evaluation,
PCM & test structures, physical measurements, reliability and
failure analysis
DEVICES & COMPONENTS: RF MEMS, MOEMS, energy harvesting, bio and
fluidics, Inertial and Resonant sensors, other sensors & actuators
Technical Program Committee
- Knut AASMUNDTVEIT, HBV, Buskerud and Vestfold University
College, Norway
- Arturo AYON, Univ. of Texas at San Antonio, USA
- Philippe BASSET, Université Paris-Est / ESYCOM / ESIEE
Paris, France
- Alain BOSSEBOEUF, IEF/CNRS-Université Paris-Sud, France
- Victor BRIGHT, Univ. of Colorado Boulder, USA
- Henri CAMON, LAAS-CNRS, France
- Benoit CHARLOT, IES, CNRS/Université Montpellier, France
- Kuo-Shen CHEN, National Cheng-Kung University, Taiwan
- Franck CHOLLET, Inst. FEMTO-ST / Univ. Franche-Comté, France
- Alexandra GARRAUD, University of Florida, USA
- Kristin IMENES, HBV, Norway
- Toshihiro ITOH, AIST (National Institute of Advanced
Industrial Science and Technology), Japan
- Elie LEFEUVRE, Université Paris Sud - CNRS, France
- Holden LI, NTU, school of Mechanical and Aerospace,
Singapore
- Tie LI, SIMIT, CAS, China
- Gaelle LISSORGUES, ESIEE, Noisy-le-Grand, France, France
- Romolo MARCELLI, CNR-IMM Roma, Italy
- Mohamed MASMOUDI, University of Sfax, Tunisia
- Raluca MULLER, IMT - Bucharest, Romania
- Anis Nurashikin NORDIN, International Islamic University,
Malaysia
- Yves-Alain PETER, EPM, Montréal, Canada, Canada
- Emanuela PROIETTI, Institute for Microelectronics and
Microsystems, Roma, Italy
- Ray ROOP, Freescale Semiconductor, USA
- John TUDOR, University of Southampton, UK
- Dong F. WANG, Jilin Univ., Changchun, China
- Gou-Jen WANG, National Chung-Hsing University, Taiwan
- Zhenfeng WANG, SIMTech, Singapore, Singapore
- Matthias WORGULL, KIT, Karlsruhe, Germany, Germany
- Hsiharng YANG, National Chung Hsing Univ., Taiwan, Taiwan
- Jian ZHU, Nanjing Electronic Devices Institute, China
- Christian A. ZORMAN, Case Western Reserve Univ., Cleveland,
USA
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