Pont-A-Mousson - July 11th - 13th, 2022 |
Monday, June 11th
8:30 – 9:30 Welcome, registration
and coffee
Emile MARTINCIC Sami HAGE-ALI |
Welcome address |
Invited speaker: Cécile Floer |
Surface Acoustic Wave devices for biomedical applications: packageless and stretchable on-skin temperature sensors, ultrasensitive magnetic sensors and microfluidic lab-on-chip |
10:45 – 11:15 : Pause
Cheng LI, Qinhong LAN, Dong
F. WANG |
A Low Frequency
Ball-impacted PE/ME Composite Energy Harvester |
José AMBIA CAMPOS, Xavier
LEROUX, Nathalie ISAC, Elie LEFEUVRE |
Microfabrication and
Characterisation of an Electrostatic MEMS Energy Harvester for Biomedical
Applications |
12:15 – 14:00 : Lunch pause
14:00 – 15:00 : Lab-on-chip / Fluidic applications
Chairperson: Abdelkrim TALBI (Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR CNRS 8520, IEMN)
Haibo CAO, Yue GU, Dong F.
WANG |
Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array |
Tieying XU, Satoshi IHIDA,
Hiroshi TOSHIYOSHI, Agnès TIXIER-MITA |
Instrumentation development
for 2D bioimpedance mapping with a Thin-Film-Transistor active matrix device |
Gábor RóZSáS, György
BOGNáR, Gábor TAKáCS, Balázs PLESZ |
Optimized process for the
manufacturing of integrated microchannel cooling devices in the back contact
of concentrator solar cells |
15:00 – 15:30 : Pause
15:30 – 17:00 : Sponsors slot + 5 min Poster presentations
Chairperson: Peter SCHNEIDER (Fraunhofer Institute for Integrated Circuits IIS)
Poster session Monday 11th |
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Thuy NGUYEN, Bernard
JOURNET, Hakim TAKHEDMIT, Gaelle LISSORGUES |
Porous Titanium Nitride
electrodes on miniaturised pH sensor for foetal health monitoring application
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zakariae OUMEKLOUL,
Sébastien PECQUEUR, Kamal LMIMOUNI, Philippe PERNOD, Abdelkrim TALBI, Bilel
HAFSI |
Design and fabrication of
Surface Acoustic Wave Gas Sensor Based on Electrochemical Process |
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Thomas SCIBERRAS, Marija
DEMICOLI, Ivan GRECH, Bertram MALLIA, Pierluigi MOLLICONE, Nicholas SAMMUT |
Experimental and Numerical
Analysis of MEMS Electrothermal Actuators with Cascaded V-shaped Mechanisms |
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Bernard Bobby NGOUNE, Hamida
HALLIL, Jean-yves DELETAGE, Corinne DEJOUS, Julien GEORGE, Dominique
BAILLARGEAT, Stephane BILA, Eric CLOUTET |
Humidity monitoring using
flexible RF sensors |
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Avvaru RAO, Prem PAL |
Micromachining
characteristics of Triton X-100 added NH2OH+KOH |
19:00 – 21:00 : Dinner - please note that monday's dinner is included in DTIP registration
Tuesday, June 12th
8:30 – 9:00 Welcome
and coffee
9:00 – 10:30 RF sensing and measurement session
Chairperson: Owen CASHA (Univ. Malta)
Do Phuong Uyen TRAN, Tien
Anh NGUYEN, Hervé MATHIAS, Emile MARTINCIC, Stéphane LEFEBVRE, Pierre-Yves
JOUBERT |
Non-contact monitoring of
current distribution in a PCB using 3D magnetic field sensor |
Alexander GöRITZ, Selin
TOLUNAY WIPF, Martin DROST, Matthias WIETSTRUCK, Mirko FRASCHKE, Andreas
KRüGER, Marco LISKER |
Tungsten grid enhanced thin-film
wafer-level encap-sulation for monolithically integrated D-Band RF-MEMS
switches in a 130 nm BiCMOS technology |
Flavio GIACOMOZZI, Emanuela
PROIETTI, Giovanni CAPOCCIA, Giovanni Maria SARDI, Giancarlo BARTOLUCCI,
Benno MARGESIN, Romolo MARCELLI |
U-shaped MEMS tunable
microwave resonators |
10:30 – 11:00 : Pause
11:00 – 12:30 : Silicon and on-chip devices
Chairperson: Alain BOSSEBOEUF (C2N, UMR9001 CNRS / Univ. Paris-Saclay)
Tarek SEOUDI, Wioletta
TRZPIL, Julien CHARENSOL, Diba AYACHE, Roman ROUSSEAU, Elena KNIAZEVA, aurore
VICET, Michael BAHRIZ |
A new silicon based
microelectromechanical resonator for photoacoustic gas sensing |
Ye ZHANG, Jian YANG, Di
ZHOU, Shuyi LIU, Dong F. WANG |
A Comparative Study of
Sensitivity Output Metrics for Detecting Mass Perturbation with a Trio
Cantilever Array |
Kei MISUMI, Naoto USAMI,
Akio HIGO, Gwenn ULLIAC, Benoit PIRANDA, Julien BOURGEOIS, Yoshio MITA |
Integration of a CMOS LSI
Chiplet into Micro Flexible Devices for Remote Electrostatic Actuation |
12:30 – 14:00 : Lunch pause
14:00 – 15:00 : Packaging session
Chairperson: Romolo MARCELLI (Italian National Research Council, CNR · Institute for Microelectronics and Microsystems IMM)
Yucheng ZHANG, Francesco
SOLAZZI, Norbert CSELYUSZKA, Michael SCHIFFER, Nikolai ANDRIANOV, Sorschag
KURT, Manuel BäUSCHER, Martin SCHNEIDER-RAMELOW, Klaus-Dieter LANG |
A novel approach to
characterize the sodium contamination caused by gas filling during anodic
bonding |
Charlotte KUTYLA, Clément
BESSOUET, Sylvain LEMETTRE, Alain BOSSEBOEUF, Philippe COSTE, Thierry
SAUVAGE, Olivier WENDLING, Aurélien BELLAMY Piyush JAGTAP, Stéphanie
ESCOUBAS, Christophe GUICHET, Olivier THOMAS, Johan MOULIN |
Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging |
Aurélien MAZZAMURRO, Cécile
GHOUILA-HOURI, Thomas ARNOULT, Abdelkrim TALBI, Philippe PERNOD |
Realization of MEMS
flush-mounted integration using through silicon vias on thermal micro-sensors
designed for aeronautics |
15:00 – 15:30 : Pause
15:30 – 17:00 : 5 min Poster presentations and poster session
Chairperson: Gaëlle LISSORGUES (Univ Gustave Eiffel, CNRS, ESYCOM)
Olivier LEFEBVRE,
Thi-Hong-Nhung DINH, Marion WOYTASIK, Mehdi AMMAR, Emile MARTINCIC |
A process for integrated 3D
trapping microcoil in microfluidic chips |
M.I. BOUKHARI, Djiddo Ali
OUMAR, stephane CAPRARO, D. PIETROY, J.P. CHATELON, J.J. ROUSSEAU |
Magnetic Shielding
Efficiency of Integrated Inductors |
Basma BECHIR, D. PIETROY,
Boukhari MAHAMAT ISSA, Thomas BLANCHET, J.P. CHATELON, J.J. ROUSSEAU |
Thermal Characterization of
Planar Integrated Inductors |
Ahmed FAROOQ, Jussi
RANTALA, Roope RAISAMO, Arto HIPPULA |
Haptic Mediation through Artificial Intelligence Magnetorheological Fluid as Vibrotactile Signal Mediator |
18:00 – 23:00 : Social event – visit to the city of Nancy and the UNESCO classified « place Stanislas » + dinner
Wednesday, June 13th
8:30 – 9:00 Welcome
and coffee
9:00 – 10:00 Inductive devices session
Chairperson: Omar ELMAZRIA (University of Lorraine · Institut Jean Lamour)
Wassim KHADDOUR, Norbert
DUMAS, Foudil DADOUCHE, Morgan MADEC, Wilfried UHRING |
A low-cost high throughput
microfluidics system for multi-thousand droplets per second sorting based on
time resolved fluorescence measurement |
Russell FARRUGIA, Barnaby
PORTELLI, Ivan GRECH, Joseph MICALLEF, Owen CASHA, Edward GATT |
AN OUT-OF-PLANE FR4-MEMS
SCANNING GRATING FOR NIR SPECTROMETER APPLICATIONS |
10:00 – 10:30 :
Pause
10:30 – 12:00 Piezoelectric devices session
Chairperson: Yoshio MITA (Univ. Tokyo)
Yang YANG, Hallil HAMIDA,
Corinne DEJOUS |
A method of optimisation in
modelling and design of solidly mounted resonator (SMR) by using Finite
Element Method |
Abdelkrim TALBI, Aurélien
MAZZAMURRO, Yannick DUSCH, Vincent MORTET, Olivier BOU MATAR, Philippe
PERNOD, Nicolas TIERCELIN |
Magnetoelastic coupling in
Lamb acoustic waveguide based on uniaxial multilayered TbCo2/FeCo
nanostructured thin film on AlN/Diamond membrane. |
Jose GARCIA-SOUTO, Javier
LAZARO-FERNANDEZ, Pablo ACEDO |
Signal conditioning design
for aero-acoustic piezoelectric MEMS microphone arrays |
12:30 – 12:45 Closing
session
12:45 – 14:00 Lunch
14:00 – 15:00 Commitees
meeting