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Pont-A-Mousson - July 11th - 13th, 2022

Technical program

Monday, June 11th

8:30 – 9:30 Welcome, registration and coffee

 9:30 – 10:45 Starting plenary session

Emile MARTINCIC

Sami HAGE-ALI

Welcome address

Invited speaker: Cécile Floer

Surface Acoustic Wave devices for biomedical applications: packageless and stretchable on-skin temperature sensors, ultrasensitive magnetic sensors and microfluidic lab-on-chip

 

10:45 – 11:15 : Pause

 11:15 – 12:15 : Energy harvesting session

Cheng LI, Qinhong LAN, Dong F. WANG

A Low Frequency Ball-impacted PE/ME Composite Energy Harvester

José AMBIA CAMPOS, Xavier LEROUX, Nathalie ISAC, Elie LEFEUVRE

Microfabrication and Characterisation of an Electrostatic MEMS Energy Harvester for Biomedical Applications

 

12:15 – 14:00 : Lunch pause

14:00 – 15:00 : Lab-on-chip / Fluidic applications

Chairperson: Abdelkrim TALBI (Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR CNRS 8520, IEMN)

Haibo CAO, Yue GU, Dong F. WANG

Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array

Tieying XU, Satoshi IHIDA, Hiroshi TOSHIYOSHI, Agnès TIXIER-MITA

Instrumentation development for 2D bioimpedance mapping with a Thin-Film-Transistor active matrix device

Gábor RóZSáS, György BOGNáR, Gábor TAKáCS, Balázs PLESZ

Optimized process for the manufacturing of integrated microchannel cooling devices in the back contact of concentrator solar cells

 

15:00 – 15:30 : Pause

15:30 – 17:00 : Sponsors slot + 5 min Poster presentations

Chairperson: Peter SCHNEIDER (Fraunhofer Institute for Integrated Circuits IIS)

Poster session Monday 11th

Thuy NGUYEN, Bernard JOURNET, Hakim TAKHEDMIT, Gaelle LISSORGUES

Porous Titanium Nitride electrodes on miniaturised pH sensor for foetal health monitoring application

zakariae OUMEKLOUL, Sébastien PECQUEUR, Kamal LMIMOUNI, Philippe PERNOD, Abdelkrim TALBI, Bilel HAFSI

Design and fabrication of Surface Acoustic Wave Gas Sensor Based on Electrochemical Process

Thomas SCIBERRAS, Marija DEMICOLI, Ivan GRECH, Bertram MALLIA, Pierluigi MOLLICONE, Nicholas SAMMUT

Experimental and Numerical Analysis of MEMS Electrothermal Actuators with Cascaded V-shaped Mechanisms

Bernard Bobby NGOUNE, Hamida HALLIL, Jean-yves DELETAGE, Corinne DEJOUS, Julien GEORGE, Dominique BAILLARGEAT, Stephane BILA, Eric CLOUTET

Humidity monitoring using flexible RF sensors

Avvaru RAO, Prem PAL

Micromachining characteristics of Triton X-100 added NH2OH+KOH

 

 
19:00  – 21:00 : Dinner - please note that monday's dinner is included in DTIP registration

 

 

Tuesday, June 12th

 

8:30 – 9:00 Welcome and coffee

9:00 – 10:30 RF sensing and measurement session

Chairperson: Owen CASHA (Univ. Malta)

Do Phuong Uyen TRAN, Tien Anh NGUYEN, Hervé MATHIAS, Emile MARTINCIC, Stéphane LEFEBVRE, Pierre-Yves JOUBERT

Non-contact monitoring of current distribution in a PCB using 3D magnetic field sensor

Alexander GöRITZ, Selin TOLUNAY WIPF, Martin DROST, Matthias WIETSTRUCK, Mirko FRASCHKE, Andreas KRüGER, Marco LISKER

Tungsten grid enhanced thin-film wafer-level encap-sulation for monolithically integrated D-Band RF-MEMS switches in a 130 nm BiCMOS technology

Flavio GIACOMOZZI, Emanuela PROIETTI, Giovanni CAPOCCIA, Giovanni Maria SARDI, Giancarlo BARTOLUCCI, Benno MARGESIN, Romolo MARCELLI

U-shaped MEMS tunable microwave resonators

 

10:30 – 11:00 : Pause

11:00 – 12:30 : Silicon and on-chip devices

Chairperson: Alain BOSSEBOEUF (C2N, UMR9001 CNRS / Univ. Paris-Saclay)

Tarek SEOUDI, Wioletta TRZPIL, Julien CHARENSOL, Diba AYACHE, Roman ROUSSEAU, Elena KNIAZEVA, aurore VICET, Michael BAHRIZ

A new silicon based microelectromechanical resonator for photoacoustic gas sensing

Ye ZHANG, Jian YANG, Di ZHOU, Shuyi LIU, Dong F. WANG  

A Comparative Study of Sensitivity Output Metrics for Detecting Mass Perturbation with a Trio Cantilever Array

Kei MISUMI, Naoto USAMI, Akio HIGO, Gwenn ULLIAC, Benoit PIRANDA, Julien BOURGEOIS, Yoshio MITA

Integration of a CMOS LSI Chiplet into Micro Flexible Devices for Remote Electrostatic Actuation

 

12:30 – 14:00 : Lunch pause

14:00 – 15:00 : Packaging session

Chairperson: Romolo MARCELLI (Italian National Research Council, CNR · Institute for Microelectronics and Microsystems IMM)

Yucheng ZHANG, Francesco SOLAZZI, Norbert CSELYUSZKA, Michael SCHIFFER, Nikolai ANDRIANOV, Sorschag KURT, Manuel BäUSCHER, Martin SCHNEIDER-RAMELOW, Klaus-Dieter LANG

A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

Charlotte KUTYLA, Clément BESSOUET, Sylvain LEMETTRE, Alain BOSSEBOEUF, Philippe COSTE, Thierry SAUVAGE, Olivier WENDLING, Aurélien BELLAMY Piyush JAGTAP, Stéphanie ESCOUBAS, Christophe GUICHET, Olivier THOMAS, Johan MOULIN

Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging

Aurélien MAZZAMURRO, Cécile GHOUILA-HOURI, Thomas ARNOULT, Abdelkrim TALBI, Philippe PERNOD

Realization of MEMS flush-mounted integration using through silicon vias on thermal micro-sensors designed for aeronautics

 

15:00 – 15:30 : Pause

15:30 – 17:00 : 5 min Poster presentations and poster session

Chairperson: Gaëlle LISSORGUES (Univ Gustave Eiffel, CNRS, ESYCOM)

Olivier LEFEBVRE, Thi-Hong-Nhung DINH, Marion WOYTASIK, Mehdi AMMAR, Emile MARTINCIC

A process for integrated 3D trapping microcoil in microfluidic chips

M.I. BOUKHARI, Djiddo Ali OUMAR, stephane CAPRARO, D. PIETROY, J.P. CHATELON, J.J. ROUSSEAU

Magnetic Shielding Efficiency of Integrated Inductors

Basma BECHIR, D. PIETROY, Boukhari MAHAMAT ISSA, Thomas BLANCHET, J.P. CHATELON, J.J. ROUSSEAU

Thermal Characterization of Planar Integrated Inductors

Ahmed FAROOQ, Jussi RANTALA, Roope RAISAMO, Arto HIPPULA

Haptic Mediation through Artificial Intelligence Magnetorheological Fluid as Vibrotactile Signal Mediator 

 

 

18:00 – 23:00 : Social event – visit to the city of Nancy and the UNESCO classified « place Stanislas » + dinner

 

 

 

Wednesday, June 13th

 

8:30 – 9:00 Welcome and coffee

9:00 – 10:00 Inductive devices session

Chairperson: Omar ELMAZRIA (University of Lorraine · Institut Jean Lamour)

Wassim KHADDOUR, Norbert DUMAS, Foudil DADOUCHE, Morgan MADEC, Wilfried UHRING

A low-cost high throughput microfluidics system for multi-thousand droplets per second sorting based on time resolved fluorescence measurement

Russell FARRUGIA, Barnaby PORTELLI, Ivan GRECH, Joseph MICALLEF, Owen CASHA, Edward GATT

AN OUT-OF-PLANE FR4-MEMS SCANNING GRATING FOR NIR SPECTROMETER APPLICATIONS

 

10:00 – 10:30 : Pause 

10:30 – 12:00 Piezoelectric devices session

Chairperson: Yoshio MITA (Univ. Tokyo)

Yang YANG, Hallil HAMIDA, Corinne DEJOUS

A method of optimisation in modelling and design of solidly mounted resonator (SMR) by using Finite Element Method

Abdelkrim TALBI, Aurélien MAZZAMURRO, Yannick DUSCH, Vincent MORTET, Olivier BOU MATAR, Philippe PERNOD, Nicolas TIERCELIN

Magnetoelastic coupling in Lamb acoustic waveguide based on uniaxial multilayered TbCo2/FeCo nanostructured thin film on AlN/Diamond membrane.

Jose GARCIA-SOUTO, Javier LAZARO-FERNANDEZ, Pablo ACEDO

Signal conditioning design for aero-acoustic piezoelectric MEMS microphone arrays

 
 

12:30 – 12:45 Closing session

12:45 – 14:00 Lunch

14:00 – 15:00 Commitees meeting

 

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