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Paris, France - May 31st - June 3rd, 2026
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The technical program will be available soon

Invited talk

Professor Ryo Shimano
Director of Cryogenic Research Center
Femtosecond laser-based nonlinear THz optoelectronics with quantum materials


Regular contributions

Authors Title O/P
xu LI, Xuming ZHANG, Zhongjian TAN, Heng JIANG, Liang WAN A Low-Voltage Electromagnetically Actuated Tunable Microlens Array for Fast Focal-Stack Light-Field Imaging O
khaled AHMAD, Baptiste BARADEL, Olivier LEON, Thibaut DUPUY, Philippe COMBETTE, Alain GIANI Reduction of Angular Sensitivity in Micro Hot-Wire Probes for Velocity Measurements O
Gaelle LISSORGUES, Emy ROUSSEAUX, Asya ÇöLöGLU, Thuy NGUYEN, Nizar BEN MOUSSA, Lionel ROUSSEAU Comparative Analysis of Vibration Modes of Boron-Doped Diamond MEMS Membranes O
Rodica-Cristina VOICU, Raluca MULLER, Oana BRINCOVEANU, Catalin PARVULESCU An electro-thermally actuated microgripper based silicon as structural material for micromanipulation O
Kuo-Shen CHEN Fracture Characterization of Silicon Carbide/Graphite Composites for MOCVD Chamber Design O
dai QINGLIN, wenjie LV, zhang YUJIE, junzhe YUAN, fang YE, liu JIYAO, qiang SHEN Explicit Measurement-Decoupled Bias-State Dual Estimators for a Four-Gyroscope Array with 9.8-Fold Bias-Stability Enhancement O
Oguz Kaan ERDEN, Chris VAN HOOF, Xavier ROTTENBERG, Bogdan VYSOTSKYI Distance Sensing in Implant-Scale Acoustic Power Delivery Links Using Transmitter Input Impedance O
Ryota KOBAYASHI, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA TITLE PUBLICATION DELAYED O
Kaito KAMIYA, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA Design and Fabrication of PMUT on Out-of-Plane-Rotation MicroStage for Wider Ultrasonic Beam Scanning Range O
Zsombor SZOMOR, Szabó ZOLTáN, Péter FüRJES High-Throughput Real Time NIR Optical Screening of Droplet-Based Microfluidic Microreactors O
Koshi MATSUZAWA A Zero-Standby-Power Fine-Step Multistable MEMS Positioner O
Min ZHU, Tianyi ZHANG, Huancheng ZHANG, Tieying XU Optimization of Micro-Nanofabrication Methods for Microfluidic Chip Vascularization Dedicated to Lung Cancer Cell Monitoring O
Sora TSUNODA, Satoshi KOMATSU Curl Reduction in Monolithic CMOS-MEMS Accelerometers by Scaling and Arraying O
Ryugo SHIMAMURA, Shun YASUNAGA, Chen WANG, Michael KRAFT, Yoshio MITA Post-Process Latch-in Assembly of Symmetrically Bistable Beams via V-Shaped Thermal Actuators O
Yiqi SHEN, Ruiqi GONG, Runlin NIE, Tieying XU Development and Experimental Validation of a Biomimetic Capillary Network Chip for Microcirculatory Disease Research O
Tomoya SAMPEI, Satoshi KOMATSU A Single-Structure Three-Axis CMOS-MEMS Accelerometer Using a Standard 0.18 µm CMOS Process O
Vishal SAHU, Priyanka DEWANGAN, Prem PAL Deep wet bulk micromachining of Borofloat glass using low-cost Ni thin film-based masking layer O
Nabil ALAID, H?l?ne DEBEDA, Eihab ABDEL-RAHMAN, Armaghan SALEHIAN, Nadia BENCHAREF, Catherine ELISSALDE
Integration of Additively Manufactured Cellular Steel Beams with Screen-Printed Thick-Film PZT for Low-Frequency Energy Harvesting O
Masato GOTO, Kaito KAMIYA, Shun YASUNAGA, Hideharu AMANO, Atsutake KOSUGE, Naonobu SHIMAMOTO, Tohru MOGAMI, Yukinori OCHIAI, Hirofumi SUMI, Yurie INOUE, Makoto IKEDA, Yoshio MITA Driving PMUT with Processor-Controlled VCO Realized by Rapid Mixed-Signal Prototyping on Agile-X Platform O
Yves EMERY, Jérôme PARENT, Nicolas PAVILLON, Eduardo SOLANAS, François MENDELS, Jean-Marc COLAGROSSI, Louis JAUGEY, Tristan COLOMB, Etienne CUCHE Characterization of Floor Noise of Vibration Amplitude Maps for Digital Holography Microscopy O
Yoshio MITA, Noriko KAWAI, Masato GOTO, Ayako MIZUSHIMA, Kei MISUMI, Tomoya NAKAMURA, Shun YASUNAGA, Yurie INOUE, Shinji TSUBOI, Akihiko YOSHIDA, Etsuko OHTA, Ryosho NAKANE, Akio HIGO, Atsutake KOSUGE, Hideharu AMANO, Hirofumi SUMI, Tohru MOGAMI, Yukinori OCHIAI, Makoto IKEDA, Naonobu SHIMAMOTO"Flipchip-to-Measure" 160-pins Batch Wiring for Quick and Reliable Agile-X VLSI PackagingO
Ayoub DAHANI, Elie LEFEUVRE, Alejandro GODíNEZ PéREZ MEDINA, Muriel THOMASSET, Etienne HERTH, Alexis BRENESHigh-Resolution Resonant Silicon-On-Glass MEMS Electrostatic Sensor With Adjustable SensitivityO
Akihiko YOSHIDA, Ryosho NAKANE, Shun YASUNAGA, Akio HIGO, Yoshio MITAImproving MEMS Reservoir Computing Performance Using Pt-Sputtered Contact SwitchesO
Sandipta SENAPATI, Kunal Kumar CHAUDHARY, Saakshi DHANEKAR Design Optimization and Experimental Validation of MEMS Micro-GC Column for Binary Gas Separation O
Mihael KATALENIC, Niko PLANTAK, Dinko OleticSetup for simultaneous measurement of mechanical and direct piezoelectrical response of mechanically excited ultrasonic resonant MEMS sensorsO
Hana BOUKHAROUBA, Gilgueng HWANG, Stephane SERFATY, Pierre-Yves JOUBERT Contactless dielectric characterization of biomimetic fluids using a passive RF resonator associated to a microfluidic chip O

Malak BIGOURD, Cyril SZOPA, Lylia SKANDER, Gabin BERGEROT, David COSCIA, Fréderic FERREIRA, Guillaume RIOLAND, Arnaud BUCH, Valérie PEULON, Pascal CARDINAEL Development and integration of lab-on-chip Micro Electro Mechanical Systems (MEMS) into an ultra-miniaturised gas chromatograph prototype for planetary studies. P
Theresa JACHMANN, Jan MEHNER On the implementation of wavelets for electrostatic BEM P
J.J. ROUSSEAU, Podda Abouna MARIAM, Antoine DEUBAIBE, J.P. CHATELON, stephane CAPRARO, D. PIETROY Electrolytic copper vias for integrated solenoid inductors with large core region P
Alina CISMARU, Emanuela PROIETTI, Romolo MARCELLI Design of an RF MEMS Switched Metamaterial Patch Antenna for Sensing Applications P
Priyanka DEWANGAN, Vishal SAHU, swarnaltha VEERLA, Prem PAL Etching characteristics of Si{100} wafer in very low- concentration NH4OH P
Sébastien LAVIELLE, Emile MARTINCIC, Bruno LE PIOUFLE, Sakina BENSALEM ELECTRODEFORMATION FOR THE ESTIMATION OF MECHANICAL PROPERTIES IN MICROALGAE P
Essey HABTESLASSIE, Ibrahim ELFADEL Comparative Study of Two Additive Manufacturing Methods for Pressure Sensor Integration in Footwear Wearables P
Charlotte NEEL, Sébastien LAVIELLE, Mariana MORAN-FERNANDEZ, Myriam TAVERNA, Bruno LE PIOUFLE, Sameh OBEID, Sakina BENSALEMDielectrophoresis-based study for the characterization of extracellular vesicles using a biochip
P
Noriko KAWAI, Akihiko YOSHIDA, Ayako MIZUSHIMA, Yurie INOUE, Shinji TSUBOI, Shun YASUNAGA, Etsuko OHTA, David BOURRIER, Amel BEGHERSA, Hugues GRANIER, Yoshio MITAOptimal Top Protection Layer Creation in “Hat-and- Skirt” High Aspect Ratio Nano Structure
P
Pierre AVERSENG, Shun YASUNAGA, Ryosho NAKANE, Yoshio MITAElectrical Readout of Symmetrically Bistable MEMS Mechanical Memory using Doped Silicon SpringsP
Lyraie RAKOTONDRATSIMBA, Jerome JUILLARD, Michael BAHRIZ, BRENES ALEXIS, Alain BOSSEBOEUFDesign of a MEMS-based photoacoustic pressure sensor – Membrane designP

 
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