Paris, France - May 31st - June 3rd, 2026 |
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Sunday, May 31st
18:00 – 20:00 Welcome and registration
A welcome event will offer the possibility to register and meet DTIP attendees and organizers. It will be held in the "Bouillon Racine - Bar du Bouillon", 3 Rue Racine 75006 Paris (Metro stations "Cluny - La Sorbonne" or "Odeon" or RER train station "Luxembourg")
Monday, June 1st
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Emile MARTINCIC |
Welcome address |
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Invited talk: Professor Ryo Shimano |
Femtosecond laser-based nonlinear THz optoelectronics with quantum materials |
10:30– 10:40 : Pause
Chairperson: Alina Cismaru (IMT, Romania)
| Vishal SAHU, Priyanka DEWANGAN, Prem PAL | Deep wet bulk micromachining of Borofloat glass using low-cost Ni thin film-based masking layer |
| Kuo-Shen CHEN | Fracture Characterization of Silicon Carbide/Graphite Composites for MOCVD Chamber Design |
| Sora TSUNODA, Satoshi KOMATSU | Curl Reduction in Monolithic CMOS-MEMS Accelerometers by Scaling and Arraying |
| Akihiko YOSHIDA, Ryosho NAKANE, Shun YASUNAGA, Akio HIGO, Yoshio MITA | Improving MEMS Reservoir Computing Performance Using Pt-Sputtered Contact Switches |
12:00 – 14:00 : Lunch pause
14:00 – 15:00 : Materials for MEMS
Chairperson: Ibrahim Elfadel (Khalifa University, AUE)
| Nabil ALAID, Hélène DEBEDA, Eihab ABDEL-RAHMAN, Armaghan SALEHIAN, Nadia BENCHAREF, Catherine ELISSALDE | Integration of Additively Manufactured Cellular Steel Beams with Screen-Printed Thick-Film PZT for Low-Frequency Energy Harvesting |
| Ayoub DAHANI, Elie LEFEUVRE, Alejandro GODíNEZ PéREZ MEDINA, Muriel THOMASSET, Etienne HERTH, Alexis BRENES | High-Resolution Resonant Silicon-On-Glass MEMS Electrostatic Sensor With Adjustable Sensitivity |
| Gaelle LISSORGUES, Emy ROUSSEAUX, Asya ÇöLöGLU, Thuy NGUYEN, Nizar BEN MOUSSA, Lionel ROUSSEAU | Comparative Analysis of Vibration Modes of Boron-Doped Diamond MEMS Membranes |
15:00 – 15:30 : Pause
15:30 – 16:30 : Thermal devices session
Chairperson: Gaëlle Lissorgues (ESIEE, Univ. G. Eiffel, France)
| khaled AHMAD, Baptiste BARADEL, Olivier LEON, Thibaut DUPUY, Philippe COMBETTE, Alain GIANI | Reduction of Angular Sensitivity in Micro Hot-Wire Probes for Velocity Measurements |
| Rodica-Cristina VOICU, Raluca MULLER, Oana BRINCOVEANU, Catalin PARVULESCU | An electro-thermally actuated microgripper based silicon as structural material for micromanipulation |
| Ryugo SHIMAMURA, Shun YASUNAGA, Chen WANG, Michael KRAFT, Yoshio MITA | Post-Process Latch-in Assembly of Symmetrically Bistable Beams via V-Shaped Thermal Actuators |
Tuesday, June 2nd
8:30 – 9:00 Welcome
(No coffee!)
9:00 – 10:20 Piezoelectric MEMS session
Chairperson: Alexis Brenes (C2N, Univ. Paris Saclay, France)
| Mihael KATALENIC, Niko PLANTAK, Dinko OLETIC |
Setup for simultaneous measurement of mechanical and direct piezoelectrical response of mechanically excited ultrasonic resonant MEMS sensors |
| Masato GOTO, Kaito KAMIYA, Shun YASUNAGA, Hideharu AMANO, Atsutake KOSUGE, Naonobu SHIMAMOTO, Tohru MOGAMI, Yukinori OCHIAI, Hirofumi SUMI, Yurie INOUE, Makoto IKEDA, Yoshio MITA | Driving PMUT with Processor-Controlled VCO Realized by Rapid Mixed-Signal Prototyping on Agile-X Platform |
| Oguz Kaan ERDEN, Chris VAN HOOF, Xavier ROTTENBERG, Bogdan VYSOTSKYI | Distance Sensing in Implant-Scale Acoustic Power Delivery Links Using Transmitter Input Impedance |
| Kaito KAMIYA, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA | Design and Fabrication of PMUT on Out-of-Plane-Rotation MicroStage for Wider Ultrasonic Beam Scanning Range |
10:20 – 11:00 : Pause: coffee break
11:00 – 12:00 : MOEMS Session
Chairperson: Peter Schneider (Fraunhofer IIS, Germany)
| xu LI, Xuming ZHANG, Zhongjian TAN, Heng JIANG, Liang WAN | A Low-Voltage Electromagnetically Actuated Tunable Microlens Array for Fast Focal-Stack Light-Field Imaging |
| Yves EMERY, Jérôme PARENT, Nicolas PAVILLON, Eduardo SOLANAS, François MENDELS, Jean-Marc COLAGROSSI, Louis JAUGEY, Tristan COLOMB, Etienne CUCHE | Characterization of Floor Noise of Vibration Amplitude Maps for Digital Holography Microscopy |
| Ryota KOBAYASHI, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA | Electrically Controllable Bistable Microactuator Enabled by Triangular Comb Array Note: Title publication was delayed to June 2nd, 2026 |
12:00 – 14:00 : Lunch pause
14:00 – 15:00 : Sponsor slot
15:00 – 15:20 : Pause
15:40 – 17:30 : poster session
5 min presentation + poster exhibition and discussions
Chairperson: Alain Bosseboeuf (CNRS, France)
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Poster session Tuesday 2nd |
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| Malak BIGOURD, Cyril SZOPA, Lylia SKANDER, Gabin BERGEROT, David COSCIA, Fréderic FERREIRA, Guillaume RIOLAND, Arnaud BUCH, Valérie PEULON, Pascal CARDINAEL | Development and integration of lab-on-chip Micro Electro Mechanical Systems (MEMS) into an ultra-miniaturised gas chromatograph prototype for planetary studies. | |
| Theresa JACHMANN, Jan MEHNER | On the implementation of wavelets for electrostatic BEM | |
| J.J. ROUSSEAU, Podda Abouna MARIAM, Antoine DEUBAIBE, J.P. CHATELON, stephane CAPRARO, D. PIETROY | Electrolytic copper vias for integrated solenoid inductors with large core region | |
| Alina CISMARU, Emanuela PROIETTI, Romolo MARCELLI | Design of an RF MEMS Switched Metamaterial Patch Antenna for Sensing Applications | |
| Priyanka DEWANGAN, Vishal SAHU, swarnaltha VEERLA, Prem PAL | Etching characteristics of Si{100} wafer in very low- concentration NH4OH | |
| Sébastien LAVIELLE, Emile MARTINCIC, Bruno LE PIOUFLE, Sakina BENSALEM | Electrodeformation for the estimation of mechanical properties in microalgae | |
| Essey HABTESLASSIE, Ibrahim ELFADEL | Comparative Study of Two Additive Manufacturing Methods for Pressure Sensor Integration in Footwear Wearables | |
| Charlotte NEEL, Sébastien LAVIELLE, Mariana MORAN-FERNANDEZ, Myriam TAVERNA, Bruno LE PIOUFLE, Sameh OBEID, Sakina BENSALEM | Dielectrophoresis-based study for the characterization of extracellular vesicles using a biochip | |
| Noriko KAWAI, Akihiko YOSHIDA, Ayako MIZUSHIMA, Yurie INOUE, Shinji TSUBOI, Shun YASUNAGA, Etsuko OHTA, David BOURRIER, Amel BEGHERSA, Hugues GRANIER, Yoshio MITA | Optimal Top Protection Layer Creation in "Hat-and- Skirt" High Aspect Ratio Nano Structure | |
| Pierre AVERSENG, Shun YASUNAGA, Ryosho NAKANE, Yoshio MITA | Electrical Readout of Symmetrically Bistable MEMS Mechanical Memory using Doped Silicon Springs | |
| Lyraie RAKOTONDRATSIMBA, Jerome JUILLARD, Michael BAHRIZ, BRENES ALEXIS, Alain BOSSEBOEUF | Design of a MEMS-based photoacoustic pressure sensor – Membrane design | |
19:30 – 23:00 : Social event
Dinner on the Canal Saint Martin, by Canauxrama (to be updated)
Wednesday, June 3rd
8:30 – 9:00 Welcome
and coffee
9:00 – 10:20 MEMS session
Chairperson: Hélène Debeda (Univ. Bordeaux, France)
| dai QINGLIN, wenjie LV, zhang YUJIE, junzhe YUAN, fang YE, liu JIYAO, qiang SHEN | Explicit Measurement-Decoupled Bias-State Dual Estimators for a Four-Gyroscope Array with 9.8-Fold Bias-Stability Enhancement |
| Koshi MATSUZAWA, Shun YASUNAGA, Ryosho NAKANE, Akio HIGO, Yoshio MITA | A Zero-Standby-Power Fine-Step Multistable MEMS Positioner |
| Tomoya SAMPEI, Satoshi KOMATSU | A Single-Structure Three-Axis CMOS-MEMS Accelerometer Using a Standard 0.18 µm CMOS Process |
| Yoshio MITA, Noriko KAWAI, Masato GOTO, Ayako MIZUSHIMA, Kei MISUMI, Tomoya NAKAMURA, Shun YASUNAGA, Yurie INOUE, Shinji TSUBOI, Akihiko YOSHIDA, Etsuko OHTA, Ryosho NAKANE, Akio HIGO, Atsutake KOSUGE, Hideharu AMANO, Hirofumi SUMI, Tohru MOGAMI, Yukinori OCHIAI, Makoto IKEDA, Naonobu SHIMAMOTO | "Flipchip-to-Measure" 160-pins Batch Wiring for Quick and Reliable Agile-X VLSI Packaging |
10:20 – 10:50 :
Pause
10:50 – 12:10 Microfluidic/health devices session
Chairperson: Yoshio Mita (Univ. Tokyo, Japan)
| Hana BOUKHAROUBA, Gilgueng HWANG, Stephane SERFATY, Pierre-Yves JOUBERT | Contactless dielectric characterization of biomimetic fluids using a passive RF resonator associated to a microfluidic chip |
| Sandipta SENAPATI, Kunal Kumar CHAUDHARY, Saakshi DHANEKAR | Design Optimization and Experimental Validation of MEMS Micro-GC Column for Binary Gas Separation |
| Yiqi SHEN, Ruiqi GONG, Runlin NIE, Tieying XU | Development and Experimental Validation of a Biomimetic Capillary Network Chip for Microcirculatory Disease Research |
| Zsombor SZOMOR, Szabó ZOLTáN, Péter FüRJES | High-Throughput Real Time NIR Optical Screening of Droplet-Based Microfluidic Microreactors |
| Min ZHU, Tianyi ZHANG, Huancheng ZHANG, Tieying XU | Optimization of Micro-Nanofabrication Methods for Microfluidic Chip Vascularization Dedicated to Lung Cancer Cell Monitoring |
12:00 – 12:15 Closing
session
12:15 – 14:00 Lunch
14:00 – 15:00 Commitees meeting
15:00 – 17:00 Round table - joint workshop DTIP / Univ. Tokyo / Univ. Paris-Saclay
15:00-15:20 Introduction of Projet "MONDIAL" by JST ASPIRE - Prof. Yoshio Mita, UTokyo Electrical Engineering
15:20-15:35 Collaborative seeds Presentation of Arai - Sugiura Group, Dr. Hirotaka Sugiura, UTokyo Mechanical Engineering
15:35-15:50 Collaborative seeds Presentation of Kuboki, Dr. Takeshi Kuboki, Hiroshima University
15:50-16:05 Collaborative Seeds Presentation of ENS Paris-Saclay, Sakina Bensalem, ENS Paris-Saclay
16:05-16:20 Collaborative Seeds Presentation of C2N, Emile Martincic, C2N, Univ. Paris-Saclay
16:20-16:30 Living Report from Japan to Europe, Mr Ryugo Shimamura, UTokyo Mita Group
16:30-16:40 Living Report from Europe to Japan (TBC), Mr Pierre Aversang, Ecole Centrale Lyon
16:40-17:00 Panel - Advantages and Challenges in Multidisciplinary Open Nanotechnology Device Development
