Split, Croatia - June 1st - 4th, 2025 |
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Sunday, June 1st
19:00 – 20:30 Welcome and registration (time to be adjusted)
Monday, June 2nd
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Emile MARTINCIC, Ante BILUSIC, Dinko OLETIC |
Welcome address |
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Invited talk (55 min): Weileun FANG (NTHU, Taiwan) |
Leveraging Semiconductors Eco-systems to MEMS |
10:30– 10:40 : Pause
Chairperson: TBD
| Kuo-Shen CHEN, Yu-Ching LEE, Chia-Yu CHEN, Shang-Feng HSU | Development of Process Emulator for Warpage Prediction in Fan-out Wafer Level Packaging |
| Priyanka DEWANGAN, Vishal SAHU, Robbi Vivek VARDHAN, Mahesh PEDDIGARI, Prem PAL | A study on wet anisotropic etching of Si{110} in low-concentration TMAH-based solutions |
| Ahmed EL JAAFARI, Clément BESSOUET, Theodorus VAN DEN BERG, Nathaniel FINDLINGS, Alain BOSSEBOEUF, Johan MOULIN | Pd thickness and temperature dependence of the sheet resistance of Pd/Y bilayers under vacuum, O2, and D2 |
| Noriko KAWAI, Tomoya NAKAMURA, Etsuko OHTA, Yoshio MITA | Hat and Skirt dual sacrificial layers for damageless Metal High Aspect Ratio Nano Structure |
12:00 – 14:00 : Lunch pause
14:00 – 15:20 : RF applications
Chairperson: TBD
| Qi WANG, Lang CHEN, Chi ZHANG, Pan ZHANG, Yufeng JIN | Die-embedded Glass Receiver Module with Integrated Antenna-LNA for Ka-Band Applications |
| Dima ALI, Ru LI, Wajih SYED, Daniel CHOI, Abe ELFADEL | Eight-Electrode VNA Testbed for the Characterization of MEMS Vibrating Ring Gyroscopes |
| Alina CISMARU, Flavio GIACOMOZZI, Girolamo TAGLIAPIETRA, Jacopo IANNACCI, Mircea PASTEANU, Damir MLADENOVIC, Romolo MARCELLI | MEMS Tunable Dual-Band Notch Filters with Triangular Sierpinski Resonators |
| Raoudha GABBOUJ, Najeh ZEIDI, Fares TOUNSI, Denis FLANDRE | Single- versus Double-layer Spiral Inductors on High-Resistivity Trap-Rich Silicon Substrate |
15:20 – 15:50 : Pause
15:50 – 17:00 : Sponsors slot + 5 min Poster presentations + Poster session
Chairperson: TBD
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Poster session Monday 2nd |
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| Fanny PAGES, Julien CHARENSOL, Julie GOUTORBE, Tarek SEOUDI, Diba AYACHE, Eric ROSENKRANTZ, aurore VICET, Michael BAHRIZ | A new capacitive Micro-Electro-Mechanical System design for photoacoustic gas sensing | |
| Qiang SHEN | An Accelerometer-assisted Self-compensation Controller for Disturbance Rejection of MIMU Array with Accuracy Improvement of 6.8 Times | |
| Titi Mahiva KEUBOU YAKOU, Edmond CAMBRIL, Etienne HERTH, Gilgueng HWANG, Anne-Marie HAGHIRI, Emile MARTINCIC | Fabrication of Large Area PDMS Microporous Membranes for Integrated Cell Culture Models | |
| HyungDal PARK, Wonsuk CHOI, Seongwhan OH, Seonho SEOK | Fabrication of Low Impedance Ti/Au Multi-electrode Arrays Through Substrate Elasticity Control for Flexible Neural Implant | |
| Gaetan SANCHEZ, Marbouh OTHMANE, Aurélien MAZZAMURRO, Mohamed BOUTGHATIN, Olivier BOU MATAR, Yannick DUSCH, Vincent MAURICE, Romain VIARD, Ammar AYMEN, Philippe PERNOD, Nicolas TIERCELIN, Abdelmounaim TOUNZI, Abdelkader BENABOU, Abdelkrim TALBI | Metrology of magnetic losses in electrical steel sheets using shear acoustic waveguide magnetic field sensor. | |
| Cheng-Yao LO, Ming-Tse YUAN | Solution for Strain-Independent Resistive Temperature Detector with a Dual-Electrode Design | |
| Ayako MIZUSHIMA, Naonobu SHIMAMOTO, Etsuko OHTA, Yoshio MITA | Visualization of XeF2 Etching Rate for Dry Release Process | |
Tuesday, June 3rd
8:30 – 9:00 Welcome
and coffee
9:00 – 10:20 MEMS session (1)
Chairperson: TBD
| Invited talk (40 min): Clément FLEURY (Silicon Austria Labs, Austria) | MOEMS characterization insights : the specific case of scanning micromirrors |
| Russell FARRUGIA, Barnaby PORTELLI, Joseph MICALLEF, Ivan GRECH | Air Damping Reduction in MEMS Micro-Mirrors: Simulation, and Experimental Insights |
| Yoshio MITA, Ayako MIZUSHIMA, Noriko KAWAI, Naonobu SHIMAMOTO | Micro Mushroom Plug and Receptacles for Reliable Chiplet Connection with Passive Alignment |
| Clement FLEURY, Takashi SASAKI, Sara GUERREIRO, Rodrigo TUMOLIN ROCHA, Anton LAGOSH, Adrien PIOT | Angular response, couplings, and dynamic deformation during dual axes actuation of resonant MEMS mirrors |
10:20 – 10:50 : Pause
11:00 – 12:00 : MEMS Session (2)
Chairperson: TBD
| Rodica-Cristina VOICU, Catalin TIBEICA, Raluca MULLER, Mihai GOLOGANU | A Z-shaped electro-thermally microgripper fabricated using aluminum |
| Wiaam EL HAKIM, Muneeb Ullah KHAN, Hani AL HAJJAR, Frédéric LAMARQUE | Micro Bi-Stable Structure for Microactuation: Design and High-Precision Fabrication Using Two-Photon Polymerization |
| Mihael KATALENIC, Niko PLANTAK, Dinko OLETIC | Designing cantilever-based resonator arrays in PiezoMUMPs technology for in-sensor ultrasonic frequency decomposition of acoustic emissions |
12:00 – 14:00 : Lunch pause
14:00 – 15:30 : Tutorial
Chairperson: TBD
| Tutorial : Abe ELFADEL | Symbolic Modeling in MEMS |
15:30 – 16:00 : Pause
16:00 – 17:20 : MEMS modelling and thermal sensing
Chairperson: TBD
| Theresa JACHMANN, David KRIEBEL, Jan MEHNER | A simple and effective reduced order model for modeling piezoelecric components with FEM |
| Ayoub DAHANI, Armine KARAMI, Alexis BRENES, Dimitri GALAYKO, Elie LEFEUVRE | Novel Design of Electrostatic MEMS for Near-Limits Vibration Energy Harvesting |
| Zhiyuan HU, Zhuoqing YANG | IN-SITU SENSOR INTEGRATION FOR REAL-TIME JUNCTION TEMPERATURE MONITORING IN POWER MODULES |
| Khaled AHMAD, Baptiste BARADEL, Olivier LEON, Thibaut DUPUY, Philippe COMBETTE, Alain GIANI | Aerothermal coupling in dual-micro-wire probe: A comprehensive study of wake effect and thermal interactions |
18:00 – 23:00 : Social event
Wednesday, June 4th
8:30 – 9:00 Welcome
and coffee
9:00 – 10:20 MEMS session (3)
Chairperson: TBD
| Invited talk (40 min): Junichiro KADAMOTO (Univ. Tokyo, Japan) | Wireless Chiplet-Based Computers for Distributed Intelligent MEMS |
| Jingping QIAO, Binbin JIAO, Ruiwen LIU, Yanmei KONG, Shichang YUN, yuxin YE | MEMS Thermal Flow Sensor with Enhanced Sensitivity by Multi Channel Data Acquisition |
| Koki MAEKAWA, Shun YASUNAGA, Ryosho NAKANE, Yoshio MITA, Akio HIGO | Microfluidic System with Integrated Electrode Array for Impedance Tomography of Cell Cultures |
10:20 – 10:50 :
Pause
10:50 – 12:10 Health sensors session
Chairperson: TBD
| Wei WANG, Yanxiang LIU, Zhuoqing YANG, Wei BIAN, Tie LI | Monitoring Device for End-tidal Carbon Dioxide and Its Applications |
| Dongqin CHEN, Yanzhi DOU, Tie LI | Application of a Calibration Method for the Saturation Response in PSA Detection of Silicon Nanowire Sensors |
| Lilia BATó, János Márk BOZORáDI, Zoltán VIZVáRI, Péter FüRJES | Microfluidic System with Integrated Electrode Array for Impedance Tomography of Cell Cultures |
| Nermine ZARDI, Shirin AFYOUNI, Mohamed MASMOUDI, Yann DANLéE, Fares TOUNSI, Denis FLANDRE | Electrical Response of a Cupric Oxide-Coated Interdigitated Transducer For Acetone Sensing |
12:00 – 12:15 Closing
session
12:15 – 14:00 Lunch
14:00 – 15:00 Commitees
meeting
