Dresden, Germany - June 2nd - 5th, 2024 |
 |
17:30 – 19:00 Dresden guided tour. The appointment is at Albertplatz - we'll stand at one of the fountains with a flag.
The tour details and path can be found >>> here <<< (Albertplatz is the A point on the map).
The weather for sunday is announced very rainy. Please think of having an umbrella or a raincoat.
19:00 – 21:30 : Dinner at >>>> Pulverturm restaurant <<<<. Committees
meeting for final organization setup and last minute adjustments.
9:30 – 10:25 Starting session: materials
Chairperson: Emile Martincic, CNRS, Univ. Paris-Saclay, France
|
Emile Martincic / Peter Schneider
/ Uwe Marschner |
Welcome address |
|
C. Tsai, Z. Xiong, C. Lee |
Investigation of Micro Pyroelectric
Infrared Sensor Performance under Different Electrode Materials |
|
W. Hortschitz, F. Keplinger, G.
Kovacs |
Materials for encapsulating
micro-system-based electric-field sensors |
10:25 – 11:00 : Pause
11:00 – 12:00 : RF devices
Chairperson: Yves-Alain Peter, Polytechnique Montréal, Canada
|
T. Furcatte, J. Barcelo Aguilo, W.
Trzpil, M. Gely, M. Kazar Mendes, G. Jourdan, S. Hentz, M. Sansa |
Optimizing optomechanical resonators
for ultra-high-frequency timing applications |
|
A. Cismaru, Gm Sardi, G.
Tagliapietra, J. Iannacci, F. Giacomozzi, R. Marcelli |
Improved Design of Metamaterial
Resonating Filters driven by RF MEMS Switches |
|
NR MD Ashif, U. Gengenbach, I. Sieber
|
Process Development for Digital
Fabrication of Radio Frequency Transmission Lines with Off-the-Shelf
Equipment |
12:00 – 13:30 : Lunch pause
13:30 – 14:30 : Biomedical
applications
Chairperson: Yoshio Mita, Univ. Tokyo, Japan
|
O. Francais, I. Kury Abi Nakhoul, P.
Davidson, L. Rousseau, P. Poulichet, S. Robben, J. Roy, P. Thiebaud, AR
Ribeiro |
Impedance-based spectroscopy system
for monitoring cell polarizations on MEA |
|
S. Riahi, G. Becan, M. Ammar, A.
Bosseboeuf, F. Laourine, B. Boutaud, D. Bouville, A. Harouri,
P. Coste, E. Lefeuvre |
Evaluation of optical interferometry
for thickness uniformity control of Parylene HT coating on titanium
substrates |
|
O. Francais, J. Roy, THN Dinh, A.
Rezgui, L. Rousseau, P. Poulichet |
Reusable microfluidic chip combining
auto-electrode alignment with lateral microfluidic accesses for
biomedical applications |
15:00 – 17:00 : Sponsors slot
+ 5 min Poster
presentations
Chairperson: Olivier Français, ESYCOM, Univ. G. Eiffel, France
| Hanna Pfannenstiel, Martin Ungerer, Ingo Sieber |
Digital Twin Architecture to
Use for Optimizing an AoD-Printing Process |
| YC
Liu, BJ Lwo, TC Chung |
Transmission Line Designs on Glass-Embedded Fan Out
Antenna in Packaging for 5G Applications |
| Y.
Fang, H. Han, D. Gai, K. Ouyang, S. Qu, DF. Wang, T. Ono, T. Itoh |
Thermoelastic Damping for Structural Optimization Applicable to Resonant Galvanometers |
| S.
Chen, DF. Wang, T. Ono, T. Itoh |
A Passive Non-uniform Magnetic Field Sensing
Mechanism with A Composite Cantilever |
| J.
Kishore, AK Pandey |
Design and Modeling of Differential Capacitive
Hexagonal Beam based MEMS Accelerometer |
| VD
Dwivedi, AK Mishra, N. Jani, PK Menon, AK Pandey |
Closed Loop Sense Feedback Control for A Dual Proof
Mass MEMS Vibratory Gyroscope |
| A.
Godinez Perez Medina, A. Brenes, J. Juillard |
Design of a novel electrostatic MEMS resonator with
hybrid nonlinear behavior |
Tuesday,
June 4th
8:30 – 9:00 Welcome and coffee
9:00 – 9:45 : Invited talk
| Jan Grahman |
MEMS scanners: Mastering front & backend from customer-specific development to pilot production |
9:45 – 10:00 : Pause
10:00 – 11:00 : Design,
simulation and validation
Chairperson: Romolo Marcelli, CNR, Italy
| D. Mayer, P. Schneider | Challenges in design and validation of MEMS based IoT solutions |
| I. Sieber, A. Deleut, L. Petani, C. Pylatiuk | Design and simulation of a body-worn optical xylene measuring device for use in pathology |
| P. Tacyniak, S. Basrour, M. Defoort | A Pspice model to numerically design piezoelectric-based acoustic power transfer |
11:00 – 11:20 : Pause
11:20
– 12:20 :
Short Course on System level
Modeling (part I)
Chairperson: Peter
Schneider
| Tamara Bechtold |
Towards
System-Level Modeling and High-Fidelity
Simulations of MEMS:
Challenges, State-of-the-Art, Perspectives |
12:20 – 13:50 : Lunch pause
13:50
– 14:30 :
Short Course on System level
Modeling (part II)
Chairperson: Peter
Schneider
| Tamara Bechtold |
Towards
System-Level Modeling and High-Fidelity
Simulations of MEMS:
Challenges, State-of-the-Art, Perspectives |
14:30 – 15:00 : Pause
15:00
– 16:30 :
Special Session on Modelling Methodology
+ Panel Discussion
Chairperson:
Peter
Schneider
|
G.
Schrag, G. Bosetti
|
Physically
Based System-level
Modeling of Acoustic MEMS Transducers by Generalized
Kirchhoffian
Networks: a Perspective
View |
|
A.
Ehrenhofer, P. Bakardjiev,
W. Yawen, A. Voigt, U.
Marschner, A. Richter, T. Wallmersperger |
System
design and models for active
materials |
|
B.
Schwartz, G. Brokmann, T. Ortlepp |
Workflow
for Modelling Electrical Properties of Piezoresistive Silicon MEMS
Devices |
|
Panelists:
Gabi Schrag, Tamara Bechtold, Adrian Ehrenhofer, Geert Brokmann Moderator: Peter Schneider |
Panel
Discussion |
16:30 – 17:45 : Logistics – from institute to Gläserne Manufaktur
17:45 – 18:30 : Guided tour @ Gläserne Manufaktur
17:00 – 23:00 : Social event
8:30 – 9:00 Welcome and coffee
9:00 – 10:00 MEMS devices (1)
Chairperson: Alina Cismaru, IMT Bucharest, Romania
| S. Bargiel, F. Zamkotsian, L. Gauthier-Manuel, D. Belharet, R. Salut | MOEMS for space applications: the challenge of multi-wafer bonding |
| A. Ustun, J. Zou | Micromachined Silicon Acoustic Delay Lines for High-Frequency Ultrasound Sensing and Imaging |
| W. Al-Mogahed, S. Voigt, P. Mehner, G. Paschew, A. Richter, J. Mehner | Multi Fourier Horn Ultrasonic Nebulizer Based on Laser Structuring of Silicon |
10:00 – 10:20 : Pause
10:20 – 11:20 MEMS devices (2)
Chairperson: Franz Keplinger, TU Wien, Austria
| L. Ackermann, M. Lewis, G. Aleksanyan, D. Palm, F. Pelke | Experimental Study on Repetitive Shock Measurements for MEMS Accelerometers |
| T. Zhu, E. Lefeuvre, E. Herth, D. Bouville, A. Brenes | Novel design of SOI-based MEMS bell plates for resonant applications |
| Z.
Nazyrova, P. Menge M'Owono, S. Hage-Ali, E. Martincic |
Piezoelectric
ZnO chemical etching for zero-power MEMS applications |
11:20 – 11:40 : Pause
11:40 – 12:40 Design and
Characterization
Chairperson: Gabriele Schrag, TU München, Germany
| R. Takahashi, K. Misumi, K. Tsuji, Ac Eiler, S. Yasunaga, A. Higo, R. Nakane, T. Iizuka, M. Ezawa, Y. Mita | Su-Schrieffer-Heeger Topological Electrical Circuit Using In-Plane Mutual Inductance |
| L. Koker, Km Reichert, U. Gengenbach, M. Reischl, M. Ungerer | Modular Platform for Automated Characterisation of Printed Structures, Devices and Circuits |
| |
|
12:40 – 12:55 Closing session
12:55 – 14:00 Lunch
14:00 – 15:00 Commitees meeting
