Virtual event, June 15th - June 26th, 2020 |
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View the live stream on YouTube (For publicly available sessions)
In addition, to the Live Stream, replays, recorded video and email address of presenter are also available except in case of confidentiality issues (links appear in red in the program below).
June 15th, 2020
09:00-10:30 (gmt+2) - Software for MEMS
Session chair: Pascal Nouet, University of Montpellier
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 9:00 | (14) LOW
POWER EMBEDDED AUDIO RECORDING USING MEMS
MICROPHONES Laurent LATORRE (LIRMM, University of Montpellier - France), Simon CHAMAILLE-JAMMES (CEFE, CNRS - France) |
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| 9:30 | (6) A
Computer Vision Algorithm for the Digitalization of
Colorimetric Lateral Flow Assay Readouts Luca PEZZAROSSA (DTU Technical University of Denmark - Denmark), Susan Ibi PREUS, Winnie Edith SVENDSEN, Jan MADSEN (Technical University of Denmark - Denmark) |
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| 10:00 | Technical corner for authors having questions |
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| 10:00 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 16th, 2020
Session chairs: Yoshio Mita, The University of Tokyo
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (2) HIGH SPEED SILICON WET BULK MICROMACHINING OF SI{111}
IN
KOH BASED SOLUTION AV NARASIMHA RAO, Prem PAL, Ashok PANDEY (Indian Institute of Technology Hyderabad - India), Krishna MENON (Research Centre Imarat Hyderabad - India), Hiroshi TANAKA, Kazuo SATO (Aichi Institute of Technology - Japan) |
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| 9:00 | (22) PREPARATION OF GERMANIUM-ON-INSULATOR (GOI) WAFERS BY
MEANS OF LAYER TRANSFER TECHNIQUE Marco LISKER, Andreas KRüGER, Patrick KRüGER, Thomas VOß, Rasuole LUKOSE, Yuji YAMAMOTO, Oksana FURSENKO, Matthias WIETSTRUCK, Mehmet KAYNAK (IHP - Leibniz-Institut für innovative Mikroelektronik - Germany) |
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| 9:30 | (50) Antireflection coating with both super-hydrophilicity
and photocatalysis effect Kazunari TADA, Yasushi MIZUMACHI (KONICA MINOLTA, INC. - Japan), Jinichi KASUYA (KONICA MINOLTA,INC. - Japan) |
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| 10:00 | (58) GROWTH OF HIGHLY TEXTURED ALUMINIUM FILMS ON LINBO3
AND
LITAO3 PIEZOELECTRIC SUBSTRATES WITH ULTRATHIN TANTALUM UNDERLAYER. Hala ACHAHBAR (femto-st and Frecnsys - France), Florent BERNARD, Emilie COURJON (Frecnsys - France), Thomas BARON (Femto-st - France) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 17th, 2020
Session chairs: Stewart Smith, University of Edinburgh
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (1) Safety and Arming Device With MEMS Based Encryption
System Driven by Electrothermal Actuator Kuang FANG (China Academy of Engineering Physics - China), TengJiang HU (Xi'an Jiaotong University - China), XiaoHua JIANG (China Academy of Engineering Physics - China), YuLong ZHAO (Xi'an Jiaotong University - China) |
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| 9:00 | (48) Micro-scale Electrostatic Attach-detach Device for Micro
Self-reconfigurable Modular Robotic System Kei MISUMI, Naoto USAMI, Akio HIGO (The University of Tokyo - Japan), Yoshio MITA (Univ. Tokyo Japan - Japan) |
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| 9:30 | (54) Long-range Planar Conveyance Device Based On A Digital
Electromagnetic Actuator Array Simon DUQUE TISNES (Universite de Technologie de Compiegne - France), Zhichao SHI (IEF, Université Paris-Sud - France), Etienne HERTH (Centre de Nanosciences et de Nanotechnologies - C2N (CNRS/Université Paris-Saclay) - France), SAMSON EDMOND (UNIVERSITE PARIS SACLAY - France), Laurent PETIT (Roberval, UTC - France), Emile MARTINCIC (Univ. Paris Sud / CNRS - France), Christine PRELLE (Roberval, UTC - France), jeremy TERRIEN (Université de Technologie de Compiègne - France), Johan MOULIN (Univ. Paris Saclay / CNRS - France), Elie LEFEUVRE (University of Paris Sud - France), Frédéric LAMARQUE (Roberval, UTC - France) |
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| 10:00 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 18th, 2020
Session chairs: Alexandra Garraud, Laboratoire des Technologies de la Microélectronique
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (27) Characterization of a Resonant Lorentz Force MEMS
Magnetomter Muneera AL SHAIBAH, Ru LI, Dima ALI (Khalifa University - United Arab Emirates), Zakriya MOHAMMED (New York University-Tandon School of Engineering - United States), Sultan ALDAHMANI (United Arab Emirates Space Agency, Space Missions - Science and Technology Directorate - United Arab Emirates), Daniel CHOI, Ibrahim ELFADEL (Khalifa University - United Arab Emirates) |
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| 9:00 | (34) CHARACTERIZATION OF MOBILITY OF CHARGED DISSOCIATED
SPECIES IN DIELECTRIC FLUIDS FOR EHD PUMPING MICROSYSTEMS Lucas BLANC (MBDA France - France), Fabien PARRAIN (Institut d'Electronique Fondamentale - France), Agnès CHAILLOT (MBDA France - France), Marion WOYTASIK (Univ. Paris Sud / CNRS - France), Olivier MAIRE (MBDA France - France), Alain BOSSEBOEUF (Center for nanoscience and nanotechnolgy - France) |
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| 9:30 | (5) two-port integrated planar devices frequency
characterization D.A. OUMAR, M.I. BOUKHARI, Stéphane CAPRARO (Laboratoire Hubert Curien - France), D. PIETROY (LabHC - France), J.P. CHATELON (LT2C - France), J.J. ROUSSEAU (LabHC - France) |
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| 10:00 | (29) NEW HIGH EFFICIENCY HEATER DESIGN FOR A 3-AXIS CMOS MEMS
CONVECTIVE ACCELEROMETER Sonia ABDELLATIF, Brahim MEZGHANI (ENIS - Tunisia), Frederick MAILLY, Pascal NOUET (University Montpellier - France) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 19th, 2020
Session chairs: Akio Higo, The University of Tokyo
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (19) STUDY ON PE-ME COUPLING STRENGTH IN AN ENERGY CONVERTOR Luwei ZHENG, Dong F. WANG, Yupeng FU, Xu YANG (Jilin University - China), Yuji SUZUKI (The University of Tokyo - Japan), Ryutaro MAEDA (UMEMSME/AIST Tsukuba - Japan) |
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| 9:00 | (60) VIBRATIONAL ENERGY HARVESTER WITH ELECTRIC DOUBLE LAYERS
ELECTRETS Shimpei ONO (Central Research Institute of Electric Power Industry - Japan) |
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| 9:30 | (61) A METHOD FOR OPTIMIZING THE OUTPUT POWER OF MEMS
VIBRATIONAL ENERGY HARVESTER Hiroyuki MITSUYA (Saginomiya Seisakusho Inc. - Japan), Hisayuki ASHIZAWA (Saginomiya Seisakusho - Japan), Noriko SHIMOMURA (Saginomiya Seisakusho Inc. - Japan), Hiroaki HOMMA (The university of Tokyo - Japan), Gen HASHIGUCHI (Shizuoka university - Japan), HIROSHI TOSHIYOSHI (The Univeristy of Tokyo - Japan) |
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| 10:00 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 22nd, 2020
Session chairs: LI King Ho Holden, Nanyang Technological University
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (18) EVALUATION OF THE ELECTRODE DESIGN OF AN INTEGRATED
BIONIC MICROFLAPPER FOR IMPROVED FLUID FLOW Simon ESSING, Regine BEHLERT, Wolfgang HöLZL, Gabriele SCHRAG (Technical University of Munich - Germany) |
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| 9:00 | (41) Designing micro-mechanical cantilever resonator arrays
for wideband detection of ultrasonic xylem cavitation emissions related
to plant water-stress Dinko OLETIC (University of Zagreb - Croatia), Etienne HERTH (Centre de Nanosciences et de Nanotechnologies - C2N (CNRS/Université Paris-Saclay) - France), David BOUVILLE (C2N - France), Emile MARTINCIC (Univ. Paris Sud / CNRS - France), Vedran BILAS (University of Zagreb - Croatia) |
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| 9:30 | (37) DESIGN AND SIMULATION OF XZ MEMS MICROPOSITIONING WITH
3D-COMPLEX STRUCTURE Tachadol SUTHISOMBOON (Institute of field robotics - Thailand), Sylwester BARGIEL, Kanty RABENOROSOA (FEMTO-ST - France), Eakkachai PENGWANG (Institute of field robotics - Thailand) |
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| 10:00 | (28) DESIGN AND FABRICATION OF HIGH PERFORMANCE RESONANT
MICRO-MIRRORS USING THE STANDARD SOIMUMPS PROCESS Russell FARRUGIA, Barnaby PORTELLI, Ivan GRECH, Joseph MICALLEF, Owen CASHA, Edward GATT (University of Malta - Malta) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 23rd, 2020
Session chairs: Emile Martincic, Université Paris-Saclay
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (11) HIGH VACUUM WAFER LEVEL PACKAGING FOR UNCOOLED IR SENSOR Mikel AZPEITIA URQUIA, Giorgio ALLEGATO, Stefano PALEARI, Francesco TRIPODI, Laura OGGIONI, Matteo GARAVAGLIA (STMicroelectronics - Italy), Yael NEMIROVSKY, Tanya BLANK (Technion - Israel) |
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| 9:00 | (32) LOW-FREQUENCY NOISE ANALYSIS OF ON-MEMBRANE MOSFET AND
IN-SITU THERMAL ANNEALING Amor SEDKI, Léopold VAN BRANDT, Valeriya KILCHYTSKA (UCLouvain - Belgium), Mohsen MACHHOUT (FSM - Tunisia), Laurent FRANCIS, Denis FLANDRE (UCLouvain - Belgium) |
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| 9:30 | (59) Assessment of Annealing Treatment for Wrinckle-less SiO2
Membrane Ayako MIZUSHIMA, R Ranga REDDY, Kuniaki KONISHI, Etsuko OHTA, Tomoya EZAWA, Akio HIGO, Makoto KUWATA-GONOKAMI, Yoshio MITA (The University of Tokyo - Japan) |
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| 10:00 | (35) Mechanical comparison between two titanium
micro-membranes for in vivo pressure monitoring Gwenaël BECAN (Université Paris-Saclay, CNRS - France), Jodie PHUNG, Hadrien PHILIPPE (MISTIC SAS - France), Alain BOSSEBOEUF, Philippe COSTE (C2N Orsay - France), Edouard LAUDREL, Bertrand BOUTAUD (MISTIC SAS - France), Marion WOYTASIK, Elie LEFEUVRE (University of Paris Sud - France) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 24th, 2020
Session chairs: Niels Tas, University of Twente
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (56) A 100-nG/sqrt(Hz)-LEVEL SINGLE Au PROOF-MASS 3-AXIS MEMS
ACCELEROMETER WITH PILLAR-SHAPED ELECTRODES Takashi ICHIKAWA (Tokyo Institute of Technology - Japan) |
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| 9:00 | (4) Design of Ultra-Low-Power Pulse-driven MEMS Oscillator Seonho SEOK (C2N-Orsay - France), Giorgio CRISTIANO, Taekwang JANG (ETH Zurich - Switzerland) |
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| 9:30 | (33) RESONANT MICRO-MIRROR OSCILLATION AMPLITUDE MEASUREMENT
AND ALL DIGITAL ACTUATION Barnaby PORTELLI, Ivan GRECH, Russell FARRUGIA, Joseph MICALLEF, Owen CASHA, Edward GATT (University of Malta - Malta) |
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| 10:00 | (57) EXPERIMENTAL VALIDATION OF TUNING MECHANISMS APPLIED ON
AlN PIEZOELECTRIC CONTOUR MODE MEMS RESONATORS Munira BENGASHIER, Ivan GRECH, Owen CASHA, Barnaby PORTELLI, Russell FARRUGIA (University of Malta - Malta) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
June 25th, 2020
Session chairs: Peter Schneider, Fraunhofer-Institute IIS/EAS, Dresden
| Time | Paper Title and Authors | Paper | Video |
Coffee break corner |
| 8:30 | (40)
Fabrication of porous polymer based pressure sensors using sacrificial
PVA 3D scaffolds for refined tuning of sensor performances. Sylvie BILENT (C2N - France), Emile MARTINCIC (Univ. Paris Sud / CNRS - France), Pierre-Yves JOUBERT (Université Paris Saclay - France) |
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| 9:00 | (52) PORTABLE DEVICE INTEGRATING AN ULTRASENSITIVE MECHANICAL
CRACK-BASED SENSOR FOR THE WIRELESS MONITORING OF CARDIAC ACTIVITY Nicolas DE PINHO FERREIRA, Etienne PUYOO, Bertrand MASSOT, Solène BROTTET, Christophe MALHAIRE (INL - France) |
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| 9:30 | (8) STRETCHABLE STRAIN SENSORS FOR HUMAN MOVEMENTS MONITORING Abhishek DAHIYA (IES - France), Thierry GIL, Nadine AZEMARD (LIRMM - France), Jerome THIREAU, Alain LACAMPAGNE (PhyMedExp - France), Benoit CHARLOT (CNRS/University Montpellier - France), Aida TODRI-SANIAL (CNRS-LIRMM - France) |
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| 10:00 | (36) FABRICATION OF A MULTIPLE HEATER-SENSOR PLATFORM FOR
CELL TEMPERATURE MONITORING Alexandra GARRAUD (LTM - Universite Grenoble Alpes - France), Skandar BASROUR (TIMA - Universite Grenoble Alpes - France), David PEYRADE (LTM - Universite Grenoble Alpes - France) |
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| 10:30 | Please feel free to meet each presenter in its own coffee break corner or to stay in the plenary session room to discuss or chat with other participants. | Plenary Session |
